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Shigeyuki Okura

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas supply device and valve device
    • Patent number 10,870,920
    • Issue date Dec 22, 2020
    • Tokyo Electron Limited
    • Shigeyuki Okura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas supply apparatus and gas supply method
    • Patent number 10,767,262
    • Issue date Sep 8, 2020
    • Tokyo Electron Limited
    • Shigeyuki Okura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method that includes step of introducing balla...
    • Patent number 10,584,414
    • Issue date Mar 10, 2020
    • Tokyo Electron Limited
    • Shigeyuki Okura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Source gas supply unit, film forming apparatus and source gas suppl...
    • Patent number 10,113,235
    • Issue date Oct 30, 2018
    • Tokyo Electron Limited
    • Masayuki Hirose
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming method and film forming device
    • Patent number 9,777,377
    • Issue date Oct 3, 2017
    • Tokyo Electron Limited
    • Shigeyuki Okura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vaporizer and semiconductor processing system
    • Patent number 8,382,903
    • Issue date Feb 26, 2013
    • Tokyo Electron Limited
    • Tsuneyuki Okabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Rotary switching valve
    • Patent number 8,371,334
    • Issue date Feb 12, 2013
    • CKD Corporation
    • Yukio Ozawa
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Vaporizer and semiconductor processing system
    • Patent number 8,197,600
    • Issue date Jun 12, 2012
    • Tokyo Electron Limited
    • Ken Nakao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Semiconductor processing system and vaporizer
    • Patent number 7,883,076
    • Issue date Feb 8, 2011
    • Tokyo Electron Limited
    • Tsuneyuki Okabe
    • F22 - STEAM GENERATION
  • Information Patent Grant

    Vaporizing apparatus and semiconductor processing system
    • Patent number 7,547,003
    • Issue date Jun 16, 2009
    • Tokyo Electron Limited
    • Tsuneyuki Okabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vaporizer
    • Patent number 7,452,424
    • Issue date Nov 18, 2008
    • Tokyo Electron Limited
    • Tsuneyuki Okabe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Liquid raw material supply unit for vaporizer
    • Patent number 7,343,926
    • Issue date Mar 18, 2008
    • CKD Corporation
    • Tsuneyuki Okabe
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents