Shigeyuki Uzawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element positioning apparatus, projection optical system an...
- Patent number 7,948,695
- Issue date May 24, 2011
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Grant
Optical element positioning apparatus, projection optical system an...
- Patent number 7,821,726
- Issue date Oct 26, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, pressure control method for the same, and devic...
- Patent number 7,525,106
- Issue date Apr 28, 2009
- Canon Kabushiki Kaisha
- Kouhei Imoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface position detecting system and method
- Patent number 7,166,855
- Issue date Jan 23, 2007
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 6,963,075
- Issue date Nov 8, 2005
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device manufacturing method, semiconductor manu...
- Patent number 6,864,953
- Issue date Mar 8, 2005
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Projection exposure apparatus, and device manufacturing method whic...
- Patent number 6,614,503
- Issue date Sep 2, 2003
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method having a detection timing determi...
- Patent number 6,559,465
- Issue date May 6, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and method having a sensor selection
- Patent number 6,534,777
- Issue date Mar 18, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting system and method having an optimum value
- Patent number 6,531,706
- Issue date Mar 11, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus and exposure apparatus
- Patent number 6,493,062
- Issue date Dec 10, 2002
- Canon Kabushiki Kaisha
- Yukio Tokuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,473,158
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method of controlling same
- Patent number 6,359,688
- Issue date Mar 19, 2002
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing metho...
- Patent number 6,342,703
- Issue date Jan 29, 2002
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure control method, and device fabrication...
- Patent number 6,342,942
- Issue date Jan 29, 2002
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method
- Patent number 6,333,786
- Issue date Dec 25, 2001
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, substrate transfer system, exposure ap...
- Patent number 6,307,620
- Issue date Oct 23, 2001
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,271,910
- Issue date Aug 7, 2001
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor manufacturing apparatus and command setting method
- Patent number 6,142,660
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Norihiko Utsunomiya
- G05 - CONTROLLING REGULATING
Information Patent Grant
Aligning method
- Patent number 6,097,495
- Issue date Aug 1, 2000
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and scanning exposure method usin...
- Patent number 6,081,614
- Issue date Jun 27, 2000
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and alignment system
- Patent number 5,986,766
- Issue date Nov 16, 1999
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting method and scanning exposure method usin...
- Patent number 5,920,398
- Issue date Jul 6, 1999
- Canon Kabushiki Kaisha
- Takehiko Iwanaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method and apparatus in which scanning exposure...
- Patent number 5,793,471
- Issue date Aug 11, 1998
- Canon Kabushiki Kaisha
- Tsuneo Kanda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment for layer formation through determination of target value...
- Patent number 5,783,341
- Issue date Jul 21, 1998
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method wherein alignment is carried out by c...
- Patent number 5,751,404
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and semiconductor exposure method
- Patent number 5,695,897
- Issue date Dec 9, 1997
- Canon Kabushiki Kaisha
- Noriyuki Mitome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method
- Patent number 5,585,925
- Issue date Dec 17, 1996
- Canon Kabushiki Kaisha
- Makoto Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method utilizing reliability weighting coefficients
- Patent number 5,543,921
- Issue date Aug 6, 1996
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and alignment system
- Patent number 5,499,099
- Issue date Mar 12, 1996
- Canon Kabushiki Kaisha
- Makoto Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Optical Element Positioning Apparatus, Projection Optical System an...
- Publication number 20100321803
- Publication date Dec 23, 2010
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AN...
- Publication number 20090021847
- Publication date Jan 22, 2009
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, PRESSURE CONTROL METHOD FOR THE SAME, AND DEVIC...
- Publication number 20080073571
- Publication date Mar 27, 2008
- Kouhei IMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface position detecting method
- Publication number 20030132401
- Publication date Jul 17, 2003
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface position detecting method
- Publication number 20020085757
- Publication date Jul 4, 2002
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS
- Publication number 20020054280
- Publication date May 9, 2002
- YUKIO TOKUDA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME
- Publication number 20020001082
- Publication date Jan 3, 2002
- SATOSHI AKIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
- Publication number 20010050761
- Publication date Dec 13, 2001
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device manufacturing method, semiconductor manu...
- Publication number 20010048084
- Publication date Dec 6, 2001
- Shigeyuki Uzawa
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Surface position detecting system and method
- Publication number 20010020687
- Publication date Sep 13, 2001
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Surface position detecting system and method
- Publication number 20010019111
- Publication date Sep 6, 2001
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shigeyuki Uzawa

Person

Patents Grantslast 30 patents

Optical element positioning apparatus, projection optical system an...

Optical element positioning apparatus, projection optical system an...

Exposure apparatus, pressure control method for the same, and devic...

Surface position detecting system and method

Scanning exposure apparatus and device manufacturing method

Exposure apparatus, device manufacturing method, semiconductor manu...

Projection exposure apparatus, and device manufacturing method whic...

Surface position detecting method having a detection timing determi...

Surface position detecting system and method having a sensor selection

Surface position detecting system and method having an optimum value

Driving apparatus and exposure apparatus

Exposure method and exposure apparatus

Projection exposure apparatus and method of controlling same

Exposure apparatus, exposure method, and device manufacturing metho...

Exposure apparatus, exposure control method, and device fabrication...

Aligning method

Substrate holding apparatus, substrate transfer system, exposure ap...

Projection exposure apparatus and method

Semiconductor manufacturing apparatus and command setting method

Aligning method

Surface position detecting method and scanning exposure method usin...

Alignment method and alignment system

Surface position detecting method and scanning exposure method usin...

Projection exposure method and apparatus in which scanning exposure...

Alignment for layer formation through determination of target value...

Exposure apparatus and method wherein alignment is carried out by c...

Alignment method and semiconductor exposure method

Alignment method

Aligning method utilizing reliability weighting coefficients

Alignment method and alignment system

Patents Applicationslast 30 patents

Optical Element Positioning Apparatus, Projection Optical System an...

OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AN...

EXPOSURE APPARATUS, PRESSURE CONTROL METHOD FOR THE SAME, AND DEVIC...

Surface position detecting method

Surface position detecting method

DRIVING APPARATUS AND EXPOSURE APPARATUS

PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME

EXPOSURE METHOD AND EXPOSURE APPARATUS

Exposure apparatus, device manufacturing method, semiconductor manu...

Surface position detecting system and method

Surface position detecting system and method