Shigure Ohmukai

Follow

Person

Yamanashi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20130068163
- Publication date Mar 21, 2013
- TOKYO ELECTRON LIMITED
- Tatsuya YAMAGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...