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Shih-Chung Kon
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system including dual ion filter for downstrea...
Patent number
11,967,486
Issue date
Apr 23, 2024
Lam Research Corporation
Andrew Stratton Bravo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Acoustic assisted single wafer wet clean for semiconductor wafer pr...
Patent number
8,585,825
Issue date
Nov 19, 2013
Lam Research Corporation
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for particle removal by single-phase and two-phase media
Patent number
8,226,775
Issue date
Jul 24, 2012
Lam Research Corporation
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Materials for particle removal by single-phase and two-phase media
Patent number
8,211,846
Issue date
Jul 3, 2012
Lam Research Group
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Apparatus for particle removal by single-phase and two-phase media
Patent number
8,084,406
Issue date
Dec 27, 2011
Lam Research Corporation
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
Publication number
20240266147
Publication date
Aug 8, 2024
LAM RESEARCH CORPORATION
Andrew Stratton BRAVO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER
Publication number
20230298859
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Andrew Stratton BRAVO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE PLASMA SOURCE SHOWERHEAD ASSEMBLY WITH ALUMINUM FLUORIDE PLA...
Publication number
20230282450
Publication date
Sep 7, 2023
LAM RESEARCH CORPORATION
Eric A. PAPE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
Publication number
20220076924
Publication date
Mar 10, 2022
LAM RESEARCH CORPORATION
Andrew Stratton BRAVO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPIN CHUCK INCLUDING EDGE RING
Publication number
20180096879
Publication date
Apr 5, 2018
LAM RESEARCH AG
Shih-Chung KON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20180040502
Publication date
Feb 8, 2018
LAM RESEARCH AG
Shih-Chung KON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Pr...
Publication number
20140034096
Publication date
Feb 6, 2014
LAM RESEARCH CORPORATION
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20120132234
Publication date
May 31, 2012
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACOUSTIC ASSISTED SINGLE WAFER WET CLEAN FOR SEMICONDUCTOR WAFER PR...
Publication number
20100108093
Publication date
May 6, 2010
Lam Research Corp.
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090151757
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090151752
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIALS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090156452
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS