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Shiho Katsumi
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Nagano, JP
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor dynamic quantity-sensor and method of manufacturing t...
Patent number
6,483,283
Issue date
Nov 19, 2002
Fuji Electric Co., Ltd.
Katsumichi Uayanagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Semiconductor dynamic quantity-sensor and method of manufacturing t...
Patent number
6,281,033
Issue date
Aug 28, 2001
Fuji Electric Co., Ltd.
Katsumichi Uayanagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Semiconductor dynamic quantity-sensor and method of manufacturing t...
Publication number
20010018260
Publication date
Aug 30, 2001
Fuji Electric, Co., Ltd.
Katsumichi Uayanagi
B81 - MICRO-STRUCTURAL TECHNOLOGY