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Shiho Sasaki
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Tokyo-to, JP
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last 30 patents
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Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
7,045,259
Issue date
May 16, 2006
Intel Corporation
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
7,045,260
Issue date
May 16, 2006
Intel Corporation
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Post exposure modification of critical dimensions in mask fabrication
Patent number
6,801,295
Issue date
Oct 5, 2004
Intel Corporation
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20040197713
Publication date
Oct 7, 2004
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for manufacturing resist pattern
Publication number
20030194619
Publication date
Oct 16, 2003
Shiho Sasaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Manufacturing method of photomask
Publication number
20030143472
Publication date
Jul 31, 2003
Yasuhiro Koizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20030059688
Publication date
Mar 27, 2003
Hiroyuki Inomata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post exposure modification of critical dimensions in mask fabrication
Publication number
20030059719
Publication date
Mar 27, 2003
Takeshi Ohfuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY