Shikou Abukawa

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Akashi, JP

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Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS
- Publication number 20170233860
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...
- Publication number 20160076129
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...