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Shilpa SUDHAKARAN
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Detecting plasma arcs by monitoring RF reflected power in a plasma...
Patent number
9,386,680
Issue date
Jul 5, 2016
Applied Materials, Inc.
Jian J. Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
DETECTING PLASMA ARCS BY MONITORING RF REFLECTED POWER IN A PLASMA...
Publication number
20160095196
Publication date
Mar 31, 2016
Applied Materials, Inc.
Jian J. CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR