Shimao Yoneyama

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Process depending on plasma discharges sustained by inductive coupling
- Patent number 6,858,112
- Issue date Feb 22, 2005
- Hitachi Kokusai Electric Co., Ltd.
- Daniel L. Flamm
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High frequency plasma process wherein the plasma is executed by an...
- Patent number 5,965,034
- Issue date Oct 12, 1999
- M. C. Electronics Co., Ltd.
- Georgy Vinogradov
- H01 - BASIC ELECTRIC ELEMENTS