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Shimpei Jinnouchi
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Nirasaki, JP
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last 30 patents
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Patent Grant
Process gas supply apparatus
Patent number
5,730,804
Issue date
Mar 24, 1998
Tokyo Electron Limited
Hisashi Gomi
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
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Patent Grant
Semiconductor treatment apparatus
Patent number
5,575,854
Issue date
Nov 19, 1996
Tokyo Electron Limited
Shimpei Jinnouchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...