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Thin film formation apparatus
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Patent number 5,741,364
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Issue date Apr 21, 1998
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Fujitsu Limited
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Jun Kodama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film formation apparatus
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Patent number 5,522,343
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Issue date Jun 4, 1996
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Fujitsu Limited
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Jun Kodama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film formation apparatus
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Patent number 5,122,431
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Issue date Jun 16, 1992
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Fujitsu Limited
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Jun Kodama
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film formation apparatus
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Patent number 4,979,467
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Issue date Dec 25, 1990
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Fujitsu Limited
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Hideki Kamaji
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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