SHIN HIYAMA

Person

TOKYO, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,948,778
- Issue date Apr 2, 2024
- Kokusai Electric Corporation
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and temperature measurement unit
- Patent number 11,424,146
- Issue date Aug 23, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,101,111
- Issue date Aug 24, 2021
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,763,084
- Issue date Sep 1, 2020
- Kokusai Electric Corporation
- Hidehiro Yanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,403,478
- Issue date Sep 3, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- B08 - CLEANING
Information Patent Grant
Method for removing adhering matter and dry etching method
- Patent number 10,153,153
- Issue date Dec 11, 2018
- CENTRAL GLASS COMPANY, LIMITED
- Akiou Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,121,651
- Issue date Nov 6, 2018
- Hitachi Kokusai Electric Inc.
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing adhering matter and dry etching method
- Patent number 10,121,647
- Issue date Nov 6, 2018
- CENTRAL GLASS COMPANY, LIMITED
- Akiou Kikuchi
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,014,171
- Issue date Jul 3, 2018
- Hiatchi Kokusai Electric, Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,911,580
- Issue date Mar 6, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,082,797
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric, Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...
- Publication number 20240321612
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20240212989
- Publication date Jun 27, 2024
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240087937
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Naoki Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230386871
- Publication date Nov 30, 2023
- Kokusai Electric Corporation
- Naoki HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING UNIT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE P...
- Publication number 20220208587
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210343507
- Publication date Nov 4, 2021
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200381221
- Publication date Dec 3, 2020
- Kokusai Electric Corporation
- Hidehiro YANAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT UNIT
- Publication number 20190019699
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180182619
- Publication date Jun 28, 2018
- Hitachi Kokusai Electric Inc.
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180144908
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170372894
- Publication date Dec 28, 2017
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING ADHERING MATTER AND DRY ETCHING METHOD
- Publication number 20170200602
- Publication date Jul 13, 2017
- Central Glass Company, Limited
- Akiou KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20160211151
- Publication date Jul 21, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20160155630
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160013053
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150371832
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...
- Publication number 20140235068
- Publication date Aug 21, 2014
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA ASHING APPARATUS
- Publication number 20130019894
- Publication date Jan 24, 2013
- Hitachi Kokusai Electric Inc.
- Yutaka KUDOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20130012035
- Publication date Jan 10, 2013
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20120132228
- Publication date May 31, 2012
- Hitachi Kokusai Electric Inc.
- Hidehiro Yanai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100330773
- Publication date Dec 30, 2010
- Hitachi Kokusai Electric Inc.
- Shin HIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20090176381
- Publication date Jul 9, 2009
- Hitachi Kokusai Electric Inc.
- Shin HIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20090093124
- Publication date Apr 9, 2009
- Hitachi Kokusai Electric Inc.
- Shin Hiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA CVD DEVICE
- Publication number 20030205202
- Publication date Nov 6, 2003
- Kokusai Electric co., Ltd.
- KATSUNORI FUNAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor device, method for processin...
- Publication number 20020192984
- Publication date Dec 19, 2002
- HITACHI KOKUSAI ELECTRIC INC.
- Shin Hiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

SHIN HIYAMA

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and temperature measurement unit

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Plasma processing apparatus and method of manufacturing semiconduct...

Method for removing adhering matter and dry etching method

Method of manufacturing semiconductor device

Method for removing adhering matter and dry etching method

Method of manufacturing semiconductor device

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE COOLING UNIT, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT UNIT

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Method of Manufacturing Semiconductor Device

METHOD FOR REMOVING ADHERING MATTER AND DRY ETCHING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Method of Manufacturing Semiconductor Device, Substrate Processing...

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...

PLASMA PROCESSING METHOD AND PLASMA ASHING APPARATUS

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

Method of manufacturing semiconductor device

PLASMA CVD DEVICE

Method for manufacturing semiconductor device, method for processin...