Shin-ichi Hamaguchi

Follow

Person

Machida, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam exposure apparatus and a method for electron beam exp...
- Patent number 5,644,138
- Issue date Jul 1, 1997
- Fujitsu Limited
- Shin-ichi Hamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of electron beam exposure
- Patent number 4,625,121
- Issue date Nov 25, 1986
- Fujitsu Limited
- Shin-ichi Hamaguchi
- B82 - NANO-TECHNOLOGY