Shin-ichi Inoue

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of producing a contact plug
- Patent number 4,906,593
- Issue date Mar 6, 1990
- Fujitsu Limited
- Yoshimi Shioya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of selectively depositing tungsten upon a semiconductor subs...
- Patent number 4,804,560
- Issue date Feb 14, 1989
- Fujitsu Limited
- Yoshimi Shioya
- H01 - BASIC ELECTRIC ELEMENTS