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Processing method for etching a substrate
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Patent number 6,025,115
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Issue date Feb 15, 2000
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Canon Kabushiki Kaisha
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Toshiyuki Komatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Processing method and apparatus
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Patent number 5,962,194
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Issue date Oct 5, 1999
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Canon Kabushiki Kaisha
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Toshiyuki Komatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Processing method for patterning a film
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Patent number 5,863,706
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Issue date Jan 26, 1999
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Canon Kabushiki Kaisha
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Toshiyuki Komatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Processing method and apparatus
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Patent number 5,824,455
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Issue date Oct 20, 1998
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Canon Kabushiki Kaisha
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Toshiyuki Komatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Processing method and apparatus
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Patent number 5,714,306
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Issue date Feb 3, 1998
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Canon Kabushiki Kaisha
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Toshiyuki Komatsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...