Shin Kawahisa

Follow

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Atmosphere replacement apparatus, substrate transport apparatus, su...
- Patent number 9,412,634
- Issue date Aug 9, 2016
- Sinfonia Technology Co., Ltd.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port
- Patent number 8,821,098
- Issue date Sep 2, 2014
- Sinfonia Technology Co., Ltd.
- Mitsuo Natsume
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATMOSPHERE REPLACEMENT APPARATUS, SUBSTRATE TRANSPORT APPARATUS, SU...
- Publication number 20150128441
- Publication date May 14, 2015
- SINFONIA TECHNOLOGY CO., LTD.
- Mikio Segawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT
- Publication number 20100135753
- Publication date Jun 3, 2010
- SINFONIA TECHNOLOGY CO., LTD.
- Mitsuo Natsume
- H01 - BASIC ELECTRIC ELEMENTS