Shin Oowada

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 9,368,314
- Issue date Jun 14, 2016
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 8,822,919
- Issue date Sep 2, 2014
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,803,103
- Issue date Aug 12, 2014
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,368,031
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 8,053,726
- Issue date Nov 8, 2011
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,928,378
- Issue date Apr 19, 2011
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,888,642
- Issue date Feb 15, 2011
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,829,871
- Issue date Nov 9, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,745,784
- Issue date Jun 29, 2010
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,601,972
- Issue date Oct 13, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and device production method using the elec...
- Patent number 7,439,502
- Issue date Oct 21, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,423,267
- Issue date Sep 9, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,417,236
- Issue date Aug 26, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,411,191
- Issue date Aug 12, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,408,175
- Issue date Aug 5, 2008
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,297,949
- Issue date Nov 20, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,247,848
- Issue date Jul 24, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and device fabrication method using the ele...
- Patent number 7,244,932
- Issue date Jul 17, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,241,993
- Issue date Jul 10, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 7,223,973
- Issue date May 29, 2007
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,135,676
- Issue date Nov 14, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,129,485
- Issue date Oct 31, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Sheet beam-type inspection apparatus
- Patent number 7,109,484
- Issue date Sep 19, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting substrate, substrate inspecting system and el...
- Patent number 7,109,483
- Issue date Sep 19, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 7,095,022
- Issue date Aug 22, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Sheet beam-type testing apparatus
- Patent number 7,049,585
- Issue date May 23, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection with electron beam, method for operating s...
- Patent number 6,855,929
- Issue date Feb 15, 2005
- Ebara Corporation
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method of manufacturing semiconductor d...
- Patent number 6,593,152
- Issue date Jul 15, 2003
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and holder for holding an article to be polished
- Patent number 6,409,585
- Issue date Jun 25, 2002
- Ebara Corporation
- Shin Oowada
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
- Publication number 20140367570
- Publication date Dec 18, 2014
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140319346
- Publication date Oct 30, 2014
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20140034831
- Publication date Feb 6, 2014
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...
- Publication number 20120032079
- Publication date Feb 9, 2012
- KABUSHIKI KAISHA TOSHIBA
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...
- Publication number 20110104830
- Publication date May 5, 2011
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20090050822
- Publication date Feb 26, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20090039262
- Publication date Feb 12, 2009
- EBARA CORPORATION
- Mamoru NAKASUJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20090032708
- Publication date Feb 5, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20080308729
- Publication date Dec 18, 2008
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
SHEET BEAM-TYPE TESTING APPARATUS
- Publication number 20080302963
- Publication date Dec 11, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20080173815
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting substrate, substrate inspecting system and el...
- Publication number 20080121804
- Publication date May 29, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20080042060
- Publication date Feb 21, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20070272859
- Publication date Nov 29, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20070235644
- Publication date Oct 11, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20070194235
- Publication date Aug 23, 2007
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20070057186
- Publication date Mar 15, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting substrate, substrate inspecting system and el...
- Publication number 20070045536
- Publication date Mar 1, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20070018101
- Publication date Jan 25, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Sheet beam-type testing apparatus
- Publication number 20060138343
- Publication date Jun 29, 2006
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20050121611
- Publication date Jun 9, 2005
- EBARA CORPORATION
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Sheet beam-type inspection apparatus
- Publication number 20050092921
- Publication date May 5, 2005
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20040183013
- Publication date Sep 23, 2004
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20030207475
- Publication date Nov 6, 2003
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection with electron beam, method for operating s...
- Publication number 20020148975
- Publication date Oct 17, 2002
- Toshifumi Kimba
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20020148961
- Publication date Oct 17, 2002
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20020142496
- Publication date Oct 3, 2002
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting substrate, substrate inspecting system and el...
- Publication number 20020130262
- Publication date Sep 19, 2002
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and method of manufacturing semiconductor d...
- Publication number 20020109090
- Publication date Aug 15, 2002
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
Sheet beam-type inspection apparatus
- Publication number 20020036264
- Publication date Mar 28, 2002
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Shin Oowada

Person

Patents Grantslast 30 patents

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Inspection system by charged particle beam and method of manufactur...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and device production method using the elec...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and method of manufacturing semiconductor d...

Electron beam apparatus and device fabrication method using the ele...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type inspection apparatus

Method for inspecting substrate, substrate inspecting system and el...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and method of manufacturing semiconductor d...

Polishing apparatus and holder for holding an article to be polished

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTUR...

APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING S...

Electron beam apparatus and method of manufacturing semiconductor d...

ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

SHEET BEAM-TYPE TESTING APPARATUS

Electron beam apparatus and device production method using the elec...

Method for inspecting substrate, substrate inspecting system and el...

Inspection system by charged particle beam and method of manufactur...

Electron beam apparatus and device production method using the elec...

Inspection system by charged particle beam and method of manufactur...

Apparatus for inspection with electron beam, method for operating s...

Inspection system by charged particle beam and method of manufactur...

Method for inspecting substrate, substrate inspecting system and el...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type testing apparatus

Apparatus for inspection with electron beam, method for operating s...

Sheet beam-type inspection apparatus

Electron beam apparatus and method of manufacturing semiconductor d...

Electron beam apparatus and method of manufacturing semiconductor d...

Apparatus for inspection with electron beam, method for operating s...

Electron beam apparatus and device production method using the elec...

Electron beam apparatus and method of manufacturing semiconductor d...

Method for inspecting substrate, substrate inspecting system and el...

Electron beam apparatus and method of manufacturing semiconductor d...

Sheet beam-type inspection apparatus