Shin OSADA

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Patents Grantslast 30 patents

Information Patent Grant
Data collection method, substrate processing apparatus, and substra...
- Patent number 7,490,010
- Issue date Feb 10, 2009
- Tokyo Electron Limited
- Shin Osada
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Structure for storing a substrate and semiconductor manufacturing a...
- Publication number 20090087289
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Shin Osada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single-wafer type substrate processing apparatus having a carry-in...
- Publication number 20080236755
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Keisuke Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA COLLECTION METHOD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRA...
- Publication number 20080040061
- Publication date Feb 14, 2008
- TOKYO ELECTRON LIMITED
- Shin OSADA
- G05 - CONTROLLING REGULATING