Shin Takano

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,319,942
- Issue date Nov 27, 2012
- Canon Kabushiki Kaisha
- Shin Takano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system, device production method, semiconductor production...
- Patent number 6,889,014
- Issue date May 3, 2005
- Canon Kabushiki Kaisha
- Shin Takano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20100060872
- Publication date Mar 11, 2010
- Canon Kabushiki Kaisha
- Shin Takano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure system, device production method, semiconductor production...
- Publication number 20030013213
- Publication date Jan 16, 2003
- Canon Kabushiki Kaisha
- Shin Takano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY