Shin-Woo NAM

Person

Yongin-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for monitoring pulsed high-frequency power and substrate...
- Patent number 11,545,340
- Issue date Jan 3, 2023
- Semes Co., Ltd.
- Jong Hwan An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 11,244,847
- Issue date Feb 8, 2022
- Semes Co., Ltd.
- Harutyun Melikyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating unit and substrate treating apparatus comprising...
- Patent number 11,195,705
- Issue date Dec 7, 2021
- Semes Co., Ltd.
- Ogsen Galstyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 10,867,775
- Issue date Dec 15, 2020
- Semes Co., Ltd.
- Jamyung Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, system, and apparatus for controlling a temperature of a su...
- Patent number 10,563,919
- Issue date Feb 18, 2020
- Semes Co., Ltd.
- Jung Min Won
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus for supplying power and apparatus for treating substrate...
- Patent number 10,319,566
- Issue date Jun 11, 2019
- Semes Co., Ltd.
- Harutyun Melikyan
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR MONITORING PULSED HIGH-FREQUENCY POWER AND SUBSTRATE...
- Publication number 20210050184
- Publication date Feb 18, 2021
- SEMES CO., LTD.
- Jong Hwan AN
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20190131159
- Publication date May 2, 2019
- SEMES CO., LTD.
- Harutyun Melikyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SUPPLYING POWER AND APPARATUS FOR TREATING SUBSTRATE...
- Publication number 20180315580
- Publication date Nov 1, 2018
- SEMES CO., LTD.
- Harutyun MELIKYAN
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PLASMA GENERATING UNIT AND SUBSTRATE TREATING APPARATUS COMPRISING...
- Publication number 20180286641
- Publication date Oct 4, 2018
- SEMES CO., LTD.
- OGSEN GALSTYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE...
- Publication number 20180102238
- Publication date Apr 12, 2018
- SEMES CO., LTD.
- Jamyung GU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20180033594
- Publication date Feb 1, 2018
- SEMES CO., LTD.
- JAMYUNG GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CONTROLLING TEMPERATURE OF SUBSTRATE, APPARATUS FOR T...
- Publication number 20170318627
- Publication date Nov 2, 2017
- SEMES CO., LTD.
- Jung Min WON
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20170316920
- Publication date Nov 2, 2017
- SEMES CO., LTD.
- Harutyun MELIKYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MONITORING PULSED HIGH-FREQUENCY POWER AND SUBSTRATE...
- Publication number 20170103871
- Publication date Apr 13, 2017
- SEMES CO., LTD.
- Jong Hwan AN
- G01 - MEASURING TESTING

Shin-Woo NAM

Person

Patents Grantslast 30 patents

Apparatus for monitoring pulsed high-frequency power and substrate...

Substrate treating apparatus and substrate treating method

Plasma generating unit and substrate treating apparatus comprising...

Apparatus and method for treating substrate

Method, system, and apparatus for controlling a temperature of a su...

Apparatus for supplying power and apparatus for treating substrate...

Patents Applicationslast 30 patents

APPARATUS FOR MONITORING PULSED HIGH-FREQUENCY POWER AND SUBSTRATE...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

APPARATUS FOR SUPPLYING POWER AND APPARATUS FOR TREATING SUBSTRATE...

PLASMA GENERATING UNIT AND SUBSTRATE TREATING APPARATUS COMPRISING...

SUBSTRATE SUPPORT UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE...

APPARATUS AND METHOD FOR TREATING SUBSTRATE

APPARATUS FOR CONTROLLING TEMPERATURE OF SUBSTRATE, APPARATUS FOR T...

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

APPARATUS FOR MONITORING PULSED HIGH-FREQUENCY POWER AND SUBSTRATE...