Shinetsu Miura

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Device for exposing the peripheral area of a wafer
- Patent number 6,052,173
- Issue date Apr 18, 2000
- Ushiodenki Kabushiki Kaisha
- Shinetsu Miura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for positioning a mask relative to a workpiece
- Patent number 5,923,990
- Issue date Jul 13, 1999
- Ushiodenki Kabushiki Kaisha
- Shinetsu Miura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for exposing the peripheral area of a semiconductor wafer f...
- Patent number 5,880,816
- Issue date Mar 9, 1999
- Ushiodenki Kabushiki Kaisha
- Yoshiki Mimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for exposing predetermined area of peripheral part of wafer
- Patent number 5,168,021
- Issue date Dec 1, 1992
- Ushio Denki
- Tetsuji Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY