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Taoyuan Hsien, TW
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last 30 patents
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Patent Grant
Deposition system and film thickness monitoring device thereof
Patent number
7,321,129
Issue date
Jan 22, 2008
Delta Electronics, Inc.
Shing-Dar Tang
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Deposition system and film thickness monitoring device thereof
Publication number
20060033057
Publication date
Feb 16, 2006
DELTA ELECTRONICS, INC.
Shing-Dar Tang
G01 - MEASURING TESTING