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Shing-Li Sung
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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Process to open carbon based hardmask
Patent number
7,432,210
Issue date
Oct 7, 2008
Applied Materials, Inc.
Judy Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for synthesizing one-dimensional nanosubstances by electron...
Patent number
6,346,303
Issue date
Feb 12, 2002
Han-Chang Shih
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Patents Applications
last 30 patents
Information
Patent Application
Process to open carbon based hardmask overlying a dielectric layer
Publication number
20080286977
Publication date
Nov 20, 2008
Judy Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process to open carbon based hardmask
Publication number
20070077780
Publication date
Apr 5, 2007
Judy Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for etching polysilicon gates with good mask selectivity, c...
Publication number
20040152331
Publication date
Aug 5, 2004
APPLIED MATERIALS, INC.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dechucking with N2/O2 plasma
Publication number
20030236004
Publication date
Dec 25, 2003
APPLIED MATERIALS, INC.
Shing-Li Sung
H01 - BASIC ELECTRIC ELEMENTS