Shingo Hishiya

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and cleaning method
- Patent number 12,018,366
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and film forming apparatus
- Patent number 11,786,946
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Sung Duk Son
- B08 - CLEANING
Information Patent Grant
Gas introduction structure, thermal processing apparatus and gas su...
- Patent number 11,725,281
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 10,968,515
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Eiji Kikama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming blocking silicon oxide film, and storage medium
- Patent number 10,964,530
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Kyungseok Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon oxide film, and storage me...
- Patent number 10,553,686
- Issue date Feb 4, 2020
- TOKYO ELECTRONC LIMITED
- Kyungseok Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Driving method of vertical heat treatment apparatus, storage medium...
- Patent number 9,776,202
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Yutaka Motoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus and storage medium
- Patent number 9,562,285
- Issue date Feb 7, 2017
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing capacitor, capacitor and method of forming...
- Patent number 8,896,097
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Yu Wamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing method, recording medium having recorded program...
- Patent number 8,815,112
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 8,735,304
- Issue date May 27, 2014
- Elpida Memory Inc.
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming titanium nitride film
- Patent number 8,642,127
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,389,421
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Katsushige Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method of manufacturing the same and adsorpti...
- Patent number 8,288,241
- Issue date Oct 16, 2012
- Elpida Memory, Inc.
- Toshiyuki Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction tube and heat processing apparatus for a semiconductor pro...
- Patent number 8,216,378
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Hirofumi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing polysilazane film
- Patent number 8,122,850
- Issue date Feb 28, 2012
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing polysilazane film
- Patent number 7,563,481
- Issue date Jul 21, 2009
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing organosiloxane film
- Patent number 7,465,682
- Issue date Dec 16, 2008
- Tokyo Electron Limited
- Shingo Hishiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for processing organosiloxane film
- Patent number 7,259,026
- Issue date Aug 21, 2007
- Tokyo Electron Limited
- Shingo Hishiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for treating article to be treated
- Patent number 7,208,428
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide film forming method
- Patent number 7,064,084
- Issue date Jun 20, 2006
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming insulating film containing silicon...
- Patent number 6,821,566
- Issue date Nov 23, 2004
- Tokyo Electron Limited
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230422348
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS
- Publication number 20220270940
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20220122867
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD
- Publication number 20210292905
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INTRODUCTION STRUCTURE, THERMAL PROCESSING APPARATUS AND GAS SU...
- Publication number 20200407848
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning Method and Film Forming Apparatus
- Publication number 20190283093
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Sung Duk SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Heat Treatment Apparatus
- Publication number 20190186014
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
- Publication number 20190131126
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...
- Publication number 20190080913
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Kyungseok KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM
- Publication number 20150259796
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRIVING METHOD OF VERTICAL HEAT TREATMENT APPARATUS, STORAGE MEDIUM...
- Publication number 20140295082
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF MANUFACTURING CAPACITOR, CAPACITOR AND METHOD OF FORMING...
- Publication number 20130200491
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Yu WAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TITANIUM OXIDE FILM HAVING RUTILE CRYSTALLINE STR...
- Publication number 20120309163
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Takakazu KIYOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM
- Publication number 20120244721
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...
- Publication number 20120219710
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ADSORPTI...
- Publication number 20120077322
- Publication date Mar 29, 2012
- TOKYO ELECTRON LIMITED
- Toshiyuki HIROTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Method, Recording Medium Having Recorded Program...
- Publication number 20120067846
- Publication date Mar 22, 2012
- Tsuyoshi Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110300719
- Publication date Dec 8, 2011
- TOKYO ELECTRON LIMITED
- Katsushige HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING POLYSILAZANE FILM
- Publication number 20090263292
- Publication date Oct 22, 2009
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PRO...
- Publication number 20090250005
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Hirofumi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing polysilazane film
- Publication number 20070231484
- Publication date Oct 4, 2007
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing organosiloxane film
- Publication number 20060211268
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for treating organosiloxane coating film
- Publication number 20060189161
- Publication date Aug 24, 2006
- TOKYO ELECTRON LIMITED
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing method and semiconductor manufacturing...
- Publication number 20050153533
- Publication date Jul 14, 2005
- TOKYO ELECTRON LIMITED
- Satohiko Hoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for treating organosiloxane coating
- Publication number 20040231777
- Publication date Nov 25, 2004
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for treating article to be treated
- Publication number 20040219793
- Publication date Nov 4, 2004
- Shingo Hishiya
- C30 - CRYSTAL GROWTH
Information Patent Application
Oxide film forming method
- Publication number 20040087180
- Publication date May 6, 2004
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for forming insulating film containing silicon...
- Publication number 20030068437
- Publication date Apr 10, 2003
- Genji Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shingo Hishiya

Person

Patents Grantslast 30 patents

Substrate processing apparatus and cleaning method

Cleaning method and film forming apparatus

Gas introduction structure, thermal processing apparatus and gas su...

Vertical heat treatment apparatus

Method of forming blocking silicon oxide film, and storage medium

Method and apparatus for forming silicon oxide film, and storage me...

Driving method of vertical heat treatment apparatus, storage medium...

Film forming method, film forming apparatus and storage medium

Method of manufacturing capacitor, capacitor and method of forming...

Liquid processing method, recording medium having recorded program...

Film forming method, film forming apparatus, and storage medium

Method of forming titanium nitride film

Film formation method and film formation apparatus

Semiconductor device, method of manufacturing the same and adsorpti...

Reaction tube and heat processing apparatus for a semiconductor pro...

Method and apparatus for processing polysilazane film

Method and apparatus for processing polysilazane film

Method and apparatus for processing organosiloxane film

Method and apparatus for processing organosiloxane film

Method and apparatus for treating article to be treated

Oxide film forming method

Method and apparatus for forming insulating film containing silicon...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

GAS INTRODUCTION STRUCTURE, THERMAL PROCESSING APPARATUS AND GAS SU...

Cleaning Method and Film Forming Apparatus

Vertical Heat Treatment Apparatus

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

Method and Apparatus for Forming Silicon Oxide Film, and Storage Me...

FILM FORMING METHOD, FILM FORMING APPARATUS AND STORAGE MEDIUM

DRIVING METHOD OF VERTICAL HEAT TREATMENT APPARATUS, STORAGE MEDIUM...

METHOD OF MANUFACTURING CAPACITOR, CAPACITOR AND METHOD OF FORMING...

METHOD OF FORMING TITANIUM OXIDE FILM HAVING RUTILE CRYSTALLINE STR...

FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM

METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITA...

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ADSORPTI...

Liquid Processing Method, Recording Medium Having Recorded Program...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

METHOD AND APPARATUS FOR PROCESSING POLYSILAZANE FILM

REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PRO...

Method and apparatus for processing polysilazane film

Method and apparatus for processing organosiloxane film

Method and apparatus for treating organosiloxane coating film

Semiconductor manufacturing method and semiconductor manufacturing...

Method and apparatus for treating organosiloxane coating

Method and apparatus for treating article to be treated

Oxide film forming method

Method and apparatus for forming insulating film containing silicon...