Shingo Kadomura

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Low dielectric constant insulating film and method for forming the...
- Patent number 8,828,886
- Issue date Sep 9, 2014
- Tohoku University
- Seiji Samukawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOW DIELECTRIC CONSTANT INSULATING FILM AND METHOD FOR FORMING THE...
- Publication number 20120190212
- Publication date Jul 26, 2012
- Seiji SAMUKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20090325328
- Publication date Dec 31, 2009
- SEMICONDUCTOR TECHNOLOGY ACADEMIC RESEARCH CENTER
- Seiji Samukawa
- G01 - MEASURING TESTING
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20050263247
- Publication date Dec 1, 2005
- Semiconductor Technology Academic Research Center
- Seiji Samukawa
- G01 - MEASURING TESTING