TREA

Shingo Kamitomo

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  • Kumamoto-Ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate treatment apparatus
    • Patent number 8,882,961
    • Issue date Nov 11, 2014
    • Tokyo Electron Limited
    • Hironobu Hyakutake
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE TREATMENT APPARATUS
    • Publication number 20110259521
    • Publication date Oct 27, 2011
    • Tokyo Electron Limited
    • Hironobu Hyakutake
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL