Shingo Katsuki

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device and bonding system
- Patent number 10,424,502
- Issue date Sep 24, 2019
- Tokyo Electron Limited
- Masataka Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 7,934,880
- Issue date May 3, 2011
- Tokyo Electron Limited
- Yoshitaka Hara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 7,645,081
- Issue date Jan 12, 2010
- Tokyo Electron Limited
- Yoshitaka Hara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240248417
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yoji SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
- Publication number 20240006214
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Shingo Katsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND BONDING SYSTEM
- Publication number 20180019153
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Masataka MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20100061718
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Yoshitaka Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20090059187
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Yoshitaka Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY