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Shingo Kimura
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Shunan-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,731,706
Issue date
May 20, 2014
Hitachi High-Technologies Corporation
Shingo Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,100,620
Issue date
Jan 24, 2012
Hitachi High-Technologies Corporation
Masakazu Isozaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20100163181
Publication date
Jul 1, 2010
Hitachi High-Technologies Corporation
Hiroyuki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20100068009
Publication date
Mar 18, 2010
Shingo Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20090324367
Publication date
Dec 31, 2009
Masakazu Isozaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20090214399
Publication date
Aug 27, 2009
Minoru Yatomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING PROCESS APPARATUS AND MEMBER FOR ETCHING PROCESS CHAMBER
Publication number
20090183835
Publication date
Jul 23, 2009
Muneo FURUSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20090165952
Publication date
Jul 2, 2009
Susumu Tauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma etching equipment
Publication number
20080236744
Publication date
Oct 2, 2008
Muneo Furuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Member for plasma processing apparatus and plasma processing apparatus
Publication number
20060157198
Publication date
Jul 20, 2006
Muneo Furuse
H01 - BASIC ELECTRIC ELEMENTS