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Shingo KITAMURA
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Miyagi, JP
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last 30 patents
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Patent Grant
Annular member, plasma processing apparatus and plasma etching method
Patent number
11,257,662
Issue date
Feb 22, 2022
Tokyo Electron Limited
Shingo Kitamura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
APPARATUS FOR PLASMA PROCESSING AND PLASMA PROCESSING SYSTEM
Publication number
20220157575
Publication date
May 19, 2022
TOKYO ELECTRON LIMITED
Shingo KITAMURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ANNULAR MEMBER, PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
Publication number
20200066496
Publication date
Feb 27, 2020
TOKYO ELECTRON LIMITED
Shingo KITAMURA
H01 - BASIC ELECTRIC ELEMENTS