Shingo Koiwa

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support and plasma processing apparatus
- Patent number 11,798,791
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage and substrate processing apparatus
- Patent number 11,521,837
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Shingo Koiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for thermally processing a workpiece in a chamber
- Patent number 10,665,491
- Issue date May 26, 2020
- Tokyo Electron Limited
- Shingo Koiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,515,786
- Issue date Dec 24, 2019
- Tokyo Electron Limited
- Shingo Koiwa
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate detaching method
- Patent number 9,831,112
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Shingo Koiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and maintenance method thereof
- Patent number 9,613,837
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230162956
- Publication date May 25, 2023
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230163012
- Publication date May 25, 2023
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSI...
- Publication number 20230136720
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Atsushi KAWABATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS
- Publication number 20230073711
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Yuki AHIKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSIN...
- Publication number 20220415629
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK FOR A PLASMA PROCESSING APPARATUS
- Publication number 20220301914
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
- Publication number 20210391152
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200273680
- Publication date Aug 27, 2020
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20200152429
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS FOR WORKPIECE
- Publication number 20170278737
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20170092472
- Publication date Mar 30, 2017
- Shingo KOIWA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DETACHING METHOD
- Publication number 20150132969
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Shingo KOIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF
- Publication number 20150086302
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Shingo Koiwa

Person

Patents Grantslast 30 patents

Substrate support and plasma processing apparatus

Stage and substrate processing apparatus

Processing apparatus for thermally processing a workpiece in a chamber

Mounting table and plasma processing apparatus

Substrate processing apparatus and substrate detaching method

Substrate processing apparatus and maintenance method thereof

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSI...

SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS

SUBSTRATE SUPPORT, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSIN...

ELECTROSTATIC CHUCK FOR A PLASMA PROCESSING APPARATUS

STAGE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

STAGE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

PROCESSING APPARATUS FOR WORKPIECE

MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DETACHING METHOD

SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF