Shingo Maku

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Kai-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and control system for treating a hafnium-based dielectric p...
- Patent number 7,509,962
- Issue date Mar 31, 2009
- Tokyo Electron Limited
- David L. O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD method and device for forming silicon-containing insulation film
- Patent number 7,125,812
- Issue date Oct 24, 2006
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of CVD for forming silicon nitride film on substrate
- Patent number 7,094,708
- Issue date Aug 22, 2006
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and control system for treating a hafnium-based dielectric p...
- Publication number 20060162861
- Publication date Jul 27, 2006
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cvd for forming silicon nitride film on substrate
- Publication number 20050255712
- Publication date Nov 17, 2005
- TOKYO ELECTRONLIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd method and device for forming silicon-containing insulation film
- Publication number 20050095770
- Publication date May 5, 2005
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...