Shingo Shimogama

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of modifying electrostatic chuck and plasma processing appar...
- Patent number 9,558,919
- Issue date Jan 31, 2017
- Tokyo Electron Limited
- Takamitsu Kondo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MODIFYING ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPAR...
- Publication number 20140158154
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Takamitsu KONDO
- H01 - BASIC ELECTRIC ELEMENTS