Shinichi Egashira

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing system, processing method, measurement apparatus, substr...
- Patent number 12,140,878
- Issue date Nov 12, 2024
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of determining set of sample shot regions, method of obtaini...
- Patent number 12,025,924
- Issue date Jul 2, 2024
- Canon Kabushiki Kaisha
- Shinichi Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system, processing method, measurement apparatus, substr...
- Patent number 11,726,412
- Issue date Aug 15, 2023
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement apparatus, exposure apparatus, and method of manufactur...
- Patent number 11,067,908
- Issue date Jul 20, 2021
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING
Information Patent Grant
Pattern forming apparatus, deciding method, storage medium, informa...
- Patent number 10,831,116
- Issue date Nov 10, 2020
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and article manufacturing method
- Patent number 10,185,225
- Issue date Jan 22, 2019
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 10,185,235
- Issue date Jan 22, 2019
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 10,146,145
- Issue date Dec 4, 2018
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,575,413
- Issue date Feb 21, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position detection apparatus
- Patent number 8,518,614
- Issue date Aug 27, 2013
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with improved alignment mark position measuremen...
- Patent number 8,107,051
- Issue date Jan 31, 2012
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,764,357
- Issue date Jul 27, 2010
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
- Publication number 20230359134
- Publication date Nov 9, 2023
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
- Publication number 20220342324
- Publication date Oct 27, 2022
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETERMINING SET OF SAMPLE SHOT REGIONS, METHOD OF OBTAINI...
- Publication number 20220100108
- Publication date Mar 31, 2022
- Canon Kabushiki Kaisha
- Shinichi Egashira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF DETERMINING MARK POSITION
- Publication number 20210090231
- Publication date Mar 25, 2021
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20200264524
- Publication date Aug 20, 2020
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING
Information Patent Application
PATTERN FORMING APPARATUS, DECIDING METHOD, STORAGE MEDIUM, INFORMA...
- Publication number 20190064679
- Publication date Feb 28, 2019
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20180107125
- Publication date Apr 19, 2018
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20160202620
- Publication date Jul 14, 2016
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150338746
- Publication date Nov 26, 2015
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING METHOD, AND EXPOSURE METHOD AND APPARATUS
- Publication number 20130321811
- Publication date Dec 5, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20100277710
- Publication date Nov 4, 2010
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20090191651
- Publication date Jul 30, 2009
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G05 - CONTROLLING REGULATING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090091722
- Publication date Apr 9, 2009
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080129972
- Publication date Jun 5, 2008
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK POSITION DETECTION APPARATUS
- Publication number 20080063956
- Publication date Mar 13, 2008
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichi Egashira

Person

Patents Grantslast 30 patents

Processing system, processing method, measurement apparatus, substr...

Method of determining set of sample shot regions, method of obtaini...

Processing system, processing method, measurement apparatus, substr...

Measurement apparatus, exposure apparatus, and method of manufactur...

Pattern forming apparatus, deciding method, storage medium, informa...

Lithography apparatus and article manufacturing method

Measurement apparatus, lithography apparatus, and method of manufac...

Measurement apparatus, lithography apparatus, and method of manufac...

Exposure apparatus, exposure method, and device manufacturing method

Mark position detection apparatus

Exposure apparatus with improved alignment mark position measuremen...

Exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...

PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...

METHOD OF DETERMINING SET OF SAMPLE SHOT REGIONS, METHOD OF OBTAINI...

METHOD AND APPARATUS OF DETERMINING MARK POSITION

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

PATTERN FORMING APPARATUS, DECIDING METHOD, STORAGE MEDIUM, INFORMA...

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

MEASURING METHOD, AND EXPOSURE METHOD AND APPARATUS

EXPOSURE APPARATUS

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

MARK POSITION DETECTION APPARATUS