Shinichi Hara

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gallium nitride particles and method for producing same
- Patent number 12,351,455
- Issue date Jul 8, 2025
- Tosoh Corporation
- Masami Mesuda
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Oxide sintered body, method for producing same and sputtering target
- Patent number 10,669,208
- Issue date Jun 2, 2020
- Tosoh Corporation
- Kenichi Itoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exposure apparatus having a processing chamber, a vacuum chamber an...
- Patent number 7,670,754
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Ryo Edo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus with tanks storing helium gas and method of manu...
- Patent number 7,566,422
- Issue date Jul 28, 2009
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus
- Patent number 7,325,404
- Issue date Feb 5, 2008
- Canon Kabushiki Kaisha
- Shinichi Hara
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Apparatus and method for removing contaminant on original, method o...
- Patent number 7,319,507
- Issue date Jan 15, 2008
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus
- Patent number 7,265,812
- Issue date Sep 4, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling system, exposure apparatus having the same, and device manu...
- Patent number 7,212,274
- Issue date May 1, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cooling apparatus and method, and exposure apparatus having the coo...
- Patent number 7,191,599
- Issue date Mar 20, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Holding mechanism in exposure apparatus, and device manufacturing m...
- Patent number 7,158,209
- Issue date Jan 2, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus
- Patent number 7,145,632
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling mechanism
- Patent number 7,106,413
- Issue date Sep 12, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for use in exposure apparatus and device manufacturi...
- Patent number 7,102,727
- Issue date Sep 5, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cooling apparatus
- Patent number 7,095,480
- Issue date Aug 22, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination apparatus, projection exposure apparatus, and device f...
- Patent number 7,081,949
- Issue date Jul 25, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G02 - OPTICS
Information Patent Grant
Reflection type mask
- Patent number 7,072,438
- Issue date Jul 4, 2006
- Canon Kabushiki Kaisha
- Keiko Chiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Holding mechanism in exposure apparatus, and device manufacturing m...
- Patent number 7,068,348
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, atmosphere substituting method, exposure app...
- Patent number 6,990,173
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Eigo Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus, measuring apparatus, and device manufacturing...
- Patent number 6,984,362
- Issue date Jan 10, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
X-ray projection exposure apparatus and a device manufacturing method
- Patent number 6,836,531
- Issue date Dec 28, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Mask pattern magnification correction method, magnification correct...
- Patent number 6,804,323
- Issue date Oct 12, 2004
- Canon Kabushiki Kaisha
- Akira Moriya
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Processing apparatus for processing sample in predetermined atmosphere
- Patent number 6,750,946
- Issue date Jun 15, 2004
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray mask, and exposure method and apparatus using the same
- Patent number 6,728,332
- Issue date Apr 27, 2004
- Canon Kabushiki Kaisha
- Keiko Chiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, gas replacement method, semiconductor device ma...
- Patent number 6,714,277
- Issue date Mar 30, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray projection exposure apparatus and a device manufacturing method
- Patent number 6,668,037
- Issue date Dec 23, 2003
- Canon Kabushiki Kaisha
- Shinichi Hara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Processing apparatus with pressure control and gas recirculation sy...
- Patent number 6,616,898
- Issue date Sep 9, 2003
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Grant
X-ray projection exposure apparatus and a device manufacturing method
- Patent number 6,584,168
- Issue date Jun 24, 2003
- Canon Kabushiki Kaisha
- Shinichi Hara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray mask, and exposure method and apparatus using the same
- Patent number 6,317,479
- Issue date Nov 13, 2001
- Canon Kabushiki Kaisha
- Keiko Chiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray projection exposure apparatus and a device manufacturing method
- Patent number 6,310,934
- Issue date Oct 30, 2001
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus for synchrotron radiation lithography
- Patent number 6,167,111
- Issue date Dec 26, 2000
- Canon Kabushiki Kaisha
- Yutaka Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
GALLIUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING SAME
- Publication number 20250206673
- Publication date Jun 26, 2025
- TOSOH CORPORATION
- Junya IIHAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWDER OF GALLIUM NITRIDE AND METHOD FOR PRODUCING THE SAME
- Publication number 20240409429
- Publication date Dec 12, 2024
- TOSOH CORPORATION
- Yoshiro KUSUSE
- C01 - INORGANIC CHEMISTRY
Information Patent Application
GALLIUM NITRIDE PARTICLES AND METHOD FOR PRODUCING SAME
- Publication number 20230242401
- Publication date Aug 3, 2023
- TOSOH CORPORATION
- Masami MESUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SINTERED BODY, METHOD FOR PRODUCING SAME AND SPUTTERING TARGET
- Publication number 20190016638
- Publication date Jan 17, 2019
- TOSOH CORPORATION
- Kenichi ITOH
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
DISPLAY DEVICE
- Publication number 20140036199
- Publication date Feb 6, 2014
- Shisei Ka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COOLING APPARATUS
- Publication number 20070091275
- Publication date Apr 26, 2007
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion exposure apparatus
- Publication number 20060285093
- Publication date Dec 21, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination apparatus, projection exposure apparatus, and device f...
- Publication number 20060164622
- Publication date Jul 27, 2006
- Shinichi Hara
- G02 - OPTICS
Information Patent Application
Holding mechanism in exposure apparatus, and device manufacturing m...
- Publication number 20060139584
- Publication date Jun 29, 2006
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for removing contaminant on original, method o...
- Publication number 20060082743
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Masami Yonekawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling apparatus
- Publication number 20060017896
- Publication date Jan 26, 2006
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20050271558
- Publication date Dec 8, 2005
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Processing system and exposure apparatus using the same
- Publication number 20050121144
- Publication date Jun 9, 2005
- Canon Kabushiki Kaisha
- Ryo Edo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling system, exposure apparatus having the same, and device manu...
- Publication number 20050110967
- Publication date May 26, 2005
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Housing unit and exposure method using the same
- Publication number 20050095829
- Publication date May 5, 2005
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination apparatus, projection exposure apparatus, and device f...
- Publication number 20040227920
- Publication date Nov 18, 2004
- Shinichi Hara
- G02 - OPTICS
Information Patent Application
Optical system for use in exposure apparatus and device manufacturi...
- Publication number 20040227914
- Publication date Nov 18, 2004
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding mechanism in exposure apparatus, and device manufacturing m...
- Publication number 20040218160
- Publication date Nov 4, 2004
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20040200226
- Publication date Oct 14, 2004
- Shinichi Hara
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Processing apparatus for processing sample in predetermined atmosphere
- Publication number 20040187786
- Publication date Sep 30, 2004
- Canon Kabushiki Kaisha
- Yutaka Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling apparatus
- Publication number 20040174504
- Publication date Sep 9, 2004
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling mechanism
- Publication number 20040165161
- Publication date Aug 26, 2004
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reflection type mask
- Publication number 20040125911
- Publication date Jul 1, 2004
- Canon Kabushiki Kaisha
- Keiko Chiba
- B82 - NANO-TECHNOLOGY
Information Patent Application
X-ray projection exposure apparatus and a device manufacturing method
- Publication number 20040071260
- Publication date Apr 15, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling apparatus and method, and exposure apparatus having the coo...
- Publication number 20040035570
- Publication date Feb 26, 2004
- Shinichi Hara
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Processing apparatus, measuring apparatus, and device manufacturing...
- Publication number 20040022694
- Publication date Feb 5, 2004
- Canon Kabushiki Kaisha
- Shinichi Hara
- G05 - CONTROLLING REGULATING
Information Patent Application
Mask pattern magnification correction method, magnification correct...
- Publication number 20030023339
- Publication date Jan 30, 2003
- Canon Kabushiki Kaisha
- Akira Moriya
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
X-ray projection exposure apparatus and a device manufacturing method
- Publication number 20020101956
- Publication date Aug 1, 2002
- Shinichi Hara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20020094306
- Publication date Jul 18, 2002
- SHINICHI HARA
- G05 - CONTROLLING REGULATING
Information Patent Application
X-ray mask, and exposure method and apparatus using the same
- Publication number 20020021781
- Publication date Feb 21, 2002
- Keiko Chiba
- B82 - NANO-TECHNOLOGY

Shinichi Hara

Person

Patents Grantslast 30 patents

Gallium nitride particles and method for producing same

Oxide sintered body, method for producing same and sputtering target

Exposure apparatus having a processing chamber, a vacuum chamber an...

Exposure apparatus with tanks storing helium gas and method of manu...

Exposure apparatus

Apparatus and method for removing contaminant on original, method o...

Cooling apparatus

Cooling system, exposure apparatus having the same, and device manu...

Cooling apparatus and method, and exposure apparatus having the coo...

Holding mechanism in exposure apparatus, and device manufacturing m...

Cooling apparatus

Cooling mechanism

Optical system for use in exposure apparatus and device manufacturi...

Cooling apparatus

Illumination apparatus, projection exposure apparatus, and device f...

Reflection type mask

Holding mechanism in exposure apparatus, and device manufacturing m...

Positioning apparatus, atmosphere substituting method, exposure app...

Processing apparatus, measuring apparatus, and device manufacturing...

X-ray projection exposure apparatus and a device manufacturing method

Mask pattern magnification correction method, magnification correct...

Processing apparatus for processing sample in predetermined atmosphere

X-ray mask, and exposure method and apparatus using the same

Exposure apparatus, gas replacement method, semiconductor device ma...

X-ray projection exposure apparatus and a device manufacturing method

Processing apparatus with pressure control and gas recirculation sy...

X-ray projection exposure apparatus and a device manufacturing method

X-ray mask, and exposure method and apparatus using the same

X-ray projection exposure apparatus and a device manufacturing method

Exposure apparatus for synchrotron radiation lithography

Patents Applicationslast 30 patents

GALLIUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING SAME

POWDER OF GALLIUM NITRIDE AND METHOD FOR PRODUCING THE SAME

GALLIUM NITRIDE PARTICLES AND METHOD FOR PRODUCING SAME

OXIDE SINTERED BODY, METHOD FOR PRODUCING SAME AND SPUTTERING TARGET

DISPLAY DEVICE

COOLING APPARATUS

Immersion exposure apparatus

Illumination apparatus, projection exposure apparatus, and device f...

Holding mechanism in exposure apparatus, and device manufacturing m...

Apparatus and method for removing contaminant on original, method o...

Cooling apparatus

Processing apparatus, measuring apparatus, and device manufacturing...

Processing system and exposure apparatus using the same

Cooling system, exposure apparatus having the same, and device manu...

Housing unit and exposure method using the same

Illumination apparatus, projection exposure apparatus, and device f...

Optical system for use in exposure apparatus and device manufacturi...

Holding mechanism in exposure apparatus, and device manufacturing m...

Exposure apparatus

Processing apparatus for processing sample in predetermined atmosphere

Cooling apparatus

Cooling mechanism

Reflection type mask

X-ray projection exposure apparatus and a device manufacturing method

Cooling apparatus and method, and exposure apparatus having the coo...

Processing apparatus, measuring apparatus, and device manufacturing...

Mask pattern magnification correction method, magnification correct...

X-ray projection exposure apparatus and a device manufacturing method

PROCESSING APPARATUS, MEASURING APPARATUS, AND DEVICE MANUFACTURING...

X-ray mask, and exposure method and apparatus using the same