Shinichi Hatakeyama

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid amount measuring method and computer-readable recording medium
- Patent number 12,174,549
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing system, liquid amount measuring method, comput...
- Patent number 11,726,409
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Coating treatment method, computer storage medium and coating treat...
- Patent number 11,065,639
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Shogo Inaba
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method, substrate processing apparatus and sto...
- Patent number 10,295,903
- Issue date May 21, 2019
- Tokyo Electron Limited
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,139,732
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method, computer storage medium and coating apparatus
- Patent number 10,048,664
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Takafumi Hasimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Coating treatment method with airflow control, and non-transitory r...
- Patent number 9,947,534
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, liquid processing apparatus and recording...
- Patent number 9,791,778
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Takafumi Hasimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and development treatment system with airflow control inclu...
- Patent number 9,162,247
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
- Patent number 9,082,614
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
- Patent number 9,027,508
- Issue date May 12, 2015
- Tokyo Electron Limited
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating treatment method, non-transitory computer storage medium an...
- Patent number 8,940,649
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20230418166
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...
- Publication number 20220171294
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND COATING TREAT...
- Publication number 20200147637
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Shogo INABA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180284616
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20180059539
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20180021804
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Takafumi HASHIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND RECORDING...
- Publication number 20160209748
- Publication date Jul 21, 2016
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS
- Publication number 20160167079
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...
- Publication number 20150371853
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
- Publication number 20150214046
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
- Publication number 20140154890
- Publication date Jun 5, 2014
- TOKYO ELECTRON LIMITED
- Shinichi Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING TREATMENT APPARATUS, COATING AND DEVELOPING TREATMENT SYSTE...
- Publication number 20120276753
- Publication date Nov 1, 2012
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AN...
- Publication number 20120021611
- Publication date Jan 26, 2012
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Shinichi Hatakeyama

Person

Patents Grantslast 30 patents

Liquid amount measuring method and computer-readable recording medium

Substrate processing system, liquid amount measuring method, comput...

Coating treatment method, computer storage medium and coating treat...

Substrate processing method, substrate processing apparatus and sto...

Substrate processing apparatus, substrate processing method and rec...

Coating method, computer storage medium and coating apparatus

Coating treatment method with airflow control, and non-transitory r...

Liquid processing method, liquid processing apparatus and recording...

Coating and development treatment system with airflow control inclu...

Periphery coating apparatus, periphery coating method and storage m...

Periphery coating apparatus, periphery coating method and storage m...

Coating treatment method, non-transitory computer storage medium an...

Patents Applicationslast 30 patents

LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND COATING TREAT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND RECORDING...

COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS

COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...

PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...

PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...

COATING TREATMENT APPARATUS, COATING AND DEVELOPING TREATMENT SYSTE...

COATING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AN...