Shinichi Hirakawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating device and method, and exposure device and method
- Patent number 6,680,775
- Issue date Jan 20, 2004
- Nikon Corporation
- Shinichi Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask case, transporting apparatus, and transporting method
- Patent number 6,499,935
- Issue date Dec 31, 2002
- Nikon Corporation
- Shinichi Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS