Shinichi Hirano

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of determining drop recipe, imprint apparatus, and article m...
- Patent number 11,366,400
- Issue date Jun 21, 2022
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, planarized layer forming apparatus, forming appa...
- Patent number 11,260,577
- Issue date Mar 1, 2022
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,054,741
- Issue date Jul 6, 2021
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, control method therefor, and method of manuf...
- Patent number 10,583,608
- Issue date Mar 10, 2020
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 9,972,522
- Issue date May 15, 2018
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,811,004
- Issue date Nov 7, 2017
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus, processing method, and device manufacturing m...
- Patent number 9,594,312
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using same
- Patent number 9,568,836
- Issue date Feb 14, 2017
- Canon Kabushiki Kaisha
- Atsushi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, lithography apparatus, and method o...
- Patent number 9,459,541
- Issue date Oct 4, 2016
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure aparatus and method of manufacturing device to avoid colli...
- Patent number 9,280,067
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using same
- Patent number 9,134,619
- Issue date Sep 15, 2015
- Canon Kabushiki Kaisha
- Atsushi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 9,123,760
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus with conveyer and controller to output request...
- Patent number 9,069,350
- Issue date Jun 30, 2015
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,625,073
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,531,649
- Issue date Sep 10, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,502,959
- Issue date Aug 6, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 8,441,614
- Issue date May 14, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 8,416,382
- Issue date Apr 9, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,253,928
- Issue date Aug 28, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Usui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method controlling shut...
- Patent number 8,223,317
- Issue date Jul 17, 2012
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,936,446
- Issue date May 3, 2011
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure and developing system, and method of m...
- Patent number 7,508,486
- Issue date Mar 24, 2009
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing apparatus and method
- Patent number 6,519,024
- Issue date Feb 11, 2003
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Camera which compensates for motion by setting the time at which a...
- Patent number 6,445,882
- Issue date Sep 3, 2002
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus having a vibration compensation device operable d...
- Patent number 5,940,631
- Issue date Aug 17, 1999
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration reduction device
- Patent number 5,930,530
- Issue date Jul 27, 1999
- Nikon Corporation
- Shinichi Hirano
- G02 - OPTICS
Information Patent Grant
Apparatus having an image vibration reduction optical system which...
- Patent number 5,881,325
- Issue date Mar 9, 1999
- Nikon Corporation
- Yoshio Imura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Camera which compensates for motion to suppress image blur and term...
- Patent number 5,809,353
- Issue date Sep 15, 1998
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shake correcting apparatus
- Patent number 5,771,405
- Issue date Jun 23, 1998
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system with multiple processors
- Patent number 5,761,547
- Issue date Jun 2, 1998
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS, INFORMATION PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20200192219
- Publication date Jun 18, 2020
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, PLANARIZED LAYER FORMING APPARATUS, FORMING APPA...
- Publication number 20190255760
- Publication date Aug 22, 2019
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190086797
- Publication date Mar 21, 2019
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD OF DETERMINING DROP RECIPE, IMPRINT APPARATUS, AND ARTICLE M...
- Publication number 20180329315
- Publication date Nov 15, 2018
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, CONTROL METHOD THEREFOR, AND METHOD OF MANUF...
- Publication number 20160231648
- Publication date Aug 11, 2016
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160214312
- Publication date Jul 28, 2016
- Canon Kabushiki Kaisha
- Shinichi Hirano
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND DEVICE MANUFACTURING M...
- Publication number 20160064266
- Publication date Mar 3, 2016
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME
- Publication number 20150346607
- Publication date Dec 3, 2015
- Canon Kabushiki Kaisha
- Atsushi SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD O...
- Publication number 20140253899
- Publication date Sep 11, 2014
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140199635
- Publication date Jul 17, 2014
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130230371
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME
- Publication number 20130229640
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Atsushi SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130077068
- Publication date Mar 28, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20120320360
- Publication date Dec 20, 2012
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20110116070
- Publication date May 19, 2011
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20110007296
- Publication date Jan 13, 2011
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100053587
- Publication date Mar 4, 2010
- Canon Kabushiki Kaisha
- Yoshiyuki Usui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100026980
- Publication date Feb 4, 2010
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080186464
- Publication date Aug 7, 2008
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080143990
- Publication date Jun 19, 2008
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS
- Publication number 20080143996
- Publication date Jun 19, 2008
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G05 - CONTROLLING REGULATING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE AND DEVELOPING SYSTEM, AND METHOD OF M...
- Publication number 20080137043
- Publication date Jun 12, 2008
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080106721
- Publication date May 8, 2008
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS
- Publication number 20080079925
- Publication date Apr 3, 2008
- Canon Kabushiki Kaisha
- Shinichi HIRANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Camera which compensates for motion by setting the time at which a...
- Publication number 20020186970
- Publication date Dec 12, 2002
- Nikon Corporation
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichi Hirano

Person

Patents Grantslast 30 patents

Method of determining drop recipe, imprint apparatus, and article m...

Imprint apparatus, planarized layer forming apparatus, forming appa...

Imprint apparatus and method of manufacturing article

Lithography apparatus, control method therefor, and method of manuf...

Processing apparatus and device manufacturing method

Exposure apparatus and device fabrication method

Processing apparatus, processing method, and device manufacturing m...

Exposure apparatus and device manufacturing method using same

Substrate processing apparatus, lithography apparatus, and method o...

Exposure aparatus and method of manufacturing device to avoid colli...

Exposure apparatus and device manufacturing method using same

Processing apparatus and device manufacturing method

Processing apparatus with conveyer and controller to output request...

Exposure apparatus and device manufacturing method

Exposure apparatus and device fabrication method

Exposure apparatus and device fabrication method

Processing apparatus and device manufacturing method

Processing apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method controlling shut...

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure and developing system, and method of m...

Exposure apparatus and device manufacturing apparatus and method

Camera which compensates for motion by setting the time at which a...

Optical apparatus having a vibration compensation device operable d...

Vibration reduction device

Apparatus having an image vibration reduction optical system which...

Camera which compensates for motion to suppress image blur and term...

Shake correcting apparatus

Optical system with multiple processors

Patents Applicationslast 30 patents

IMPRINT APPARATUS, INFORMATION PROCESSING APPARATUS, AND METHOD OF...

IMPRINT APPARATUS, PLANARIZED LAYER FORMING APPARATUS, FORMING APPA...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

METHOD OF DETERMINING DROP RECIPE, IMPRINT APPARATUS, AND ARTICLE M...

LITHOGRAPHY APPARATUS, CONTROL METHOD THEREFOR, AND METHOD OF MANUF...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

PROCESSING APPARATUS, PROCESSING METHOD, AND DEVICE MANUFACTURING M...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME

SUBSTRATE PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD O...

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS

EXPOSURE APPARATUS, EXPOSURE AND DEVELOPING SYSTEM, AND METHOD OF M...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROCESSING APPARATUS

Camera which compensates for motion by setting the time at which a...