Shinichi IGARASHI

Person

Joetsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Photomask blank, making method, and photomask
- Patent number 9,952,501
- Issue date Apr 24, 2018
- Shin-Etsu Chemical Co., Ltd.
- Souichi Fukaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask making method, photomask blank and dry etching method
- Patent number 9,164,374
- Issue date Oct 20, 2015
- Shin-Etsu Chemical Co., Ltd.
- Shinichi Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Evaluation of etching conditions for pattern-forming film
- Patent number 8,992,788
- Issue date Mar 31, 2015
- Shin-Etsu Chemical Co., Ltd.
- Shinichi Igarashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Etching method and photomask blank processing method
- Patent number 8,920,666
- Issue date Dec 30, 2014
- Shin-Etsu Chemical Co., Ltd.
- Shinichi Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask blank, processing method, and etching method
- Patent number 8,858,814
- Issue date Oct 14, 2014
- Shin-Etsu Chemical Co., Ltd.
- Satoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask blank, photomask, and making method
- Patent number 8,841,048
- Issue date Sep 23, 2014
- Shin-Etsu Chemical Co., Ltd.
- Yukio Inazuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask making method
- Patent number 8,309,277
- Issue date Nov 13, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shinichi Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask making method, photomask blank and dry etching method
- Patent number 8,304,146
- Issue date Nov 6, 2012
- Shin-Etsu Chemical Co., Ltd.
- Shinichi Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTOMASK BLANK, MAKING METHOD, AND PHOTOMASK
- Publication number 20170082917
- Publication date Mar 23, 2017
- Shin-Etsu Chemical Co., Ltd.
- Souichi FUKAYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION FOR ETCH MASK FILM
- Publication number 20130132014
- Publication date May 23, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shinichi IGARASHI
- G01 - MEASURING TESTING
Information Patent Application
EVALUATION OF ETCHING CONDITIONS FOR PATTERN-FORMING FILM
- Publication number 20130126471
- Publication date May 23, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shinichi IGARASHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTOMASK BLANK, PHOTOMASK, AND MAKING METHOD
- Publication number 20130059235
- Publication date Mar 7, 2013
- Yukio INAZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK MAKING METHOD, PHOTOMASK BLANK AND DRY ETCHING METHOD
- Publication number 20130034806
- Publication date Feb 7, 2013
- Shin-Etsu Chemical Co., Ltd.
- Shinichi IGARASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK MAKING METHOD
- Publication number 20100316942
- Publication date Dec 16, 2010
- Shinichi IGARASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ETCHING METHOD AND PHOTOMASK BLANK PROCESSING METHOD
- Publication number 20100291478
- Publication date Nov 18, 2010
- Shinichi IGARASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK BLANK, PROCESSING METHOD, AND ETCHING METHOD
- Publication number 20100248493
- Publication date Sep 30, 2010
- Satoshi WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK MAKING METHOD, PHOTOMASK BLANK AND DRY ETCHING METHOD
- Publication number 20100176087
- Publication date Jul 15, 2010
- Shinichi Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichi IGARASHI

Person

Patents Grantslast 30 patents

Photomask blank, making method, and photomask

Photomask making method, photomask blank and dry etching method

Evaluation of etching conditions for pattern-forming film

Etching method and photomask blank processing method

Photomask blank, processing method, and etching method

Photomask blank, photomask, and making method

Photomask making method

Photomask making method, photomask blank and dry etching method

Patents Applicationslast 30 patents

PHOTOMASK BLANK, MAKING METHOD, AND PHOTOMASK

EVALUATION FOR ETCH MASK FILM

EVALUATION OF ETCHING CONDITIONS FOR PATTERN-FORMING FILM

PHOTOMASK BLANK, PHOTOMASK, AND MAKING METHOD

PHOTOMASK MAKING METHOD, PHOTOMASK BLANK AND DRY ETCHING METHOD

PHOTOMASK MAKING METHOD

ETCHING METHOD AND PHOTOMASK BLANK PROCESSING METHOD

PHOTOMASK BLANK, PROCESSING METHOD, AND ETCHING METHOD

PHOTOMASK MAKING METHOD, PHOTOMASK BLANK AND DRY ETCHING METHOD