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Shinichi IKE
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Nirasaki City, JP
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Patents Grants
last 30 patents
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Patent Grant
Film forming method for forming self-assembled monolayer on substrate
Patent number
12,152,304
Issue date
Nov 26, 2024
Tokyo Electron Limited
Shuji Azumo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film formation method and film formation device
Patent number
11,788,185
Issue date
Oct 17, 2023
Tokyo Electron Limited
Shuji Azumo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,417,514
Issue date
Aug 16, 2022
Tokyo Electron Limited
Yuichiro Wagatsuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM-FORMING METHOD
Publication number
20230148162
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Shuji AZUMO
B82 - NANO-TECHNOLOGY
Information
Patent Application
FILM-FORMING METHOD
Publication number
20220341033
Publication date
Oct 27, 2022
TOKYO ELECTRON LIMITED
Shinichi IKE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD
Publication number
20220336205
Publication date
Oct 20, 2022
Tokyo Electron Limited
Kenji OUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
Publication number
20220186362
Publication date
Jun 16, 2022
Tokyo Electron Limited
Shuji AZUMO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
Publication number
20220181144
Publication date
Jun 9, 2022
TOKYO ELECTRON LIMITED
Yumiko KAWANO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD
Publication number
20210087691
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Shuji AZUMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20200294798
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Yuichiro WAGATSUMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...