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Shinichi Kojima
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Cupertino, CA, US
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Patents Grants
last 30 patents
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Patent Grant
System for electron beam detection
Patent number
9,778,186
Issue date
Oct 3, 2017
KLA-Tencor Corporation
Shinichi Kojima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for electron beam detection
Patent number
8,692,204
Issue date
Apr 8, 2014
KLA-Tencor Corporation
Shinichi Kojima
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
System for Electron Beam Detection
Publication number
20160011110
Publication date
Jan 14, 2016
KLA-Tencor Corporation
Shinichi Kojima
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHODS FOR ELECTRON BEAM DETECTION
Publication number
20120273686
Publication date
Nov 1, 2012
Shinichi KOJIMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
APPARATUS AND METHODS FOR PATTERN GENERATION
Publication number
20120085919
Publication date
Apr 12, 2012
Shinichi KOJIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY