Shinichi Koseki

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Endpoint detection in low open area and/or high aspect ratio etch a...
- Patent number 12,046,522
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Lei Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for in-situ protection liners for high aspect...
- Patent number 11,373,877
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Daisuke Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simplified litho-etch-litho-etch process
- Patent number 9,425,058
- Issue date Aug 23, 2016
- Applied Materials, Inc.
- Hun Sang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective self-aligned double patterning of regions in an integrate...
- Patent number 8,293,656
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hun Sang Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENDPOINT DETECTION IN LOW OPEN AREA AND/OR HIGH ASPECT RATIO ETCH A...
- Publication number 20240379469
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Lei LIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENDPOINT DETECTION IN LOW OPEN AREA AND/OR HIGH ASPECT RATIO ETCH A...
- Publication number 20230268235
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Lei LIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR IN-SITU PROTECTION LINERS FOR HIGH ASPECT...
- Publication number 20210320012
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Daisuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMPLIFIED LITHO-ETCH-LITHO-ETCH PROCESS
- Publication number 20160027654
- Publication date Jan 28, 2016
- Hun Sang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SHALLOW TRENCH ISOLATION FORMATION IN A SILICON GERMANI...
- Publication number 20150371889
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- HUN SANG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE SELF-ALIGNED DOUBLE PATTERNING OF REGIONS IN AN INTEGRATE...
- Publication number 20100297850
- Publication date Nov 25, 2010
- Hun Sang Kim
- H01 - BASIC ELECTRIC ELEMENTS