Shinichi Kozuka

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,861,675
- Issue date Dec 8, 2020
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode plate for plasma processing apparatus
- Patent number D877079
- Issue date Mar 3, 2020
- TOKYO ELECTRON LIMITED
- Shinichi Kozuka
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,204,763
- Issue date Feb 12, 2019
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 9,779,962
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Takao Funakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode plate for plasma processing apparatus
- Patent number D793572
- Issue date Aug 1, 2017
- Tokyo Electron Limited
- Shinichi Kozuka
- D24 - Medical and laboratory equipment
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,653,317
- Issue date May 16, 2017
- Tokyo Electron Limited
- Masaru Nishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making semiconductor device
- Patent number 8,030,216
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Shinichi Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making semiconductor device
- Patent number 7,405,160
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Shinichi Kozuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20190139744
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20170221684
- Publication date Aug 3, 2017
- TOKYO ELECTRON LIMITED
- Masaru NISHINO
- B08 - CLEANING
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20160163554
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER
- Publication number 20160035541
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Shinichi KOZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150380282
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Takao FUNAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150118859
- Publication date Apr 30, 2015
- TOKYO ELECTRON LIMITED
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING SEMICONDUCTOR DEVICE
- Publication number 20080261404
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Shinichi Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method, storage medium storing program for implem...
- Publication number 20070134938
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Shinichi Kozuka
- H01 - BASIC ELECTRIC ELEMENTS

Shinichi Kozuka

Person

Patents Grantslast 30 patents

Plasma processing apparatus and plasma processing method

Electrode plate for plasma processing apparatus

Plasma processing apparatus and plasma processing method

Plasma etching method

Electrode plate for plasma processing apparatus

Plasma processing method and plasma processing apparatus

Method of making semiconductor device

Method of making semiconductor device

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD

PLASMA ETCHING METHOD

PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

METHOD OF MAKING SEMICONDUCTOR DEVICE

Plasma processing method, storage medium storing program for implem...