Shinichi KURITA

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
- Patent number 11,854,771
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer stack for display applications
- Patent number 11,600,642
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removal of sharp corners from diffuser plate
- Patent number 11,123,837
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Ilyoung Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
- Patent number 11,094,508
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Layer stack for display applications
- Patent number 11,049,887
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas flow guide design for uniform flow distribution and efficient p...
- Patent number 10,697,062
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film encapsulation processing system and process kit
- Patent number 10,655,222
- Issue date May 19, 2020
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film encapsulation mask preheat and substrate buffer chamber
- Patent number 10,604,846
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffuser temperature control
- Patent number 10,487,401
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slit valve door with moving mating part
- Patent number 10,453,718
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Mehran Behdjat
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Grooved backing plate for standing wave compensation
- Patent number 10,373,809
- Issue date Aug 6, 2019
- Applied Materials Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,312,058
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support assembly with non-uniform gas flow clearance
- Patent number 10,280,510
- Issue date May 7, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer robot with substrate cooling
- Patent number 10,265,868
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,262,837
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition processing chamber permitting low-pressure...
- Patent number 10,184,179
- Issue date Jan 22, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with quadrants
- Patent number 10,123,379
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical inline CVD system
- Patent number 9,922,854
- Issue date Mar 20, 2018
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anodized showerhead
- Patent number 9,758,869
- Issue date Sep 12, 2017
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer robot with chamber and substrate monitoring capa...
- Patent number 9,691,650
- Issue date Jun 27, 2017
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with quadrants
- Patent number 9,677,177
- Issue date Jun 13, 2017
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor assembly
- Patent number D784276
- Issue date Apr 18, 2017
- Applied Materials, Inc.
- Robin L. Tiner
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for providing a floating seal for chamber doors
- Patent number 9,580,956
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Billy C. Leung
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and apparatus for sealing an opening of a processing chamber
- Patent number 9,458,538
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ground return for plasma processes
- Patent number 9,382,621
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical inline CVD system
- Patent number 9,324,597
- Issue date Apr 26, 2016
- Applied Materials, Inc.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolation of microwave sources through bellows
- Patent number 9,315,900
- Issue date Apr 19, 2016
- Applied Materials, Inc.
- Benjamin M. Johnston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of forming an indium gallium zinc oxide layer
- Patent number 9,214,340
- Issue date Dec 15, 2015
- APPLIED MATERIALS, INC.
- Shinichi Kurita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 9,200,368
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with ceramic insulation
- Patent number 9,187,827
- Issue date Nov 17, 2015
- Applied Materials, Inc.
- Gaku Furuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM FOR MANUFACTURING TANDEM CELL STRUCTURES
- Publication number 20240379896
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Shinobu Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
- Publication number 20240105427
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASSEMBLED GRID TRAY
- Publication number 20230260811
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Shinobu ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER STACK FOR DISPLAY APPLICATIONS
- Publication number 20210288084
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Xiangxin RUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
- Publication number 20210280392
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Chien-Teh KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
- Publication number 20200194233
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...
- Publication number 20200017971
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
- Publication number 20190193233
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Ilyoung HONG
- B24 - GRINDING POLISHING
Information Patent Application
LAYER STACK FOR DISPLAY APPLICATIONS
- Publication number 20190148416
- Publication date May 16, 2019
- Applied Materials, Inc.
- Xiangxin RUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT
- Publication number 20180155835
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM ENCAPSULATION MASK PREHEAT AND SUBSTRATE BUFFER CHAMBER
- Publication number 20180119285
- Publication date May 3, 2018
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20180025890
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Soo Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF RETURN STRAP SHIELDING COVER
- Publication number 20170365449
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Yi CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DODECADON TRANSFER CHAMBER AND PROCESSING SYSTEM HAVING THE SAME
- Publication number 20170352562
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-SHADOW FRAME PLASMA PROCESSING CHAMBER
- Publication number 20170335459
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Young-jin CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH NON-UNIFORM GAS FLOW CLEARANCE
- Publication number 20170275759
- Publication date Sep 28, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH QUADRANTS
- Publication number 20170231033
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- Robin L. TINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES
- Publication number 20170178867
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Jozef KUDELA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSER TEMPERATURE CONTROL
- Publication number 20170096738
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROOVED BACKING PLATE FOR STANDING WAVE COMPENSATION
- Publication number 20170092469
- Publication date Mar 30, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE AREA DUAL SUBSTRATE PROCESSING SYSTEM
- Publication number 20170084880
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW FRAME WITH NON-UNIFORM GAS FLOW CLEARANCE FOR IMPROVED CLEANING
- Publication number 20170081757
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESSING CHAMBER PERMITTING LOW-PRESSURE...
- Publication number 20160362788
- Publication date Dec 15, 2016
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT PERMITTIN...
- Publication number 20160319422
- Publication date Nov 3, 2016
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUND RETURN FOR PLASMA PROCESSES
- Publication number 20160305025
- Publication date Oct 20, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20160056019
- Publication date Feb 25, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA CLEAN SOURCE FEED BETWEEN BACKING PLATE AND DIFFUSER
- Publication number 20160032451
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD OF FORMING AN INDIUM GALLIUM ZINC OXIDE LAYER
- Publication number 20150221508
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Shinichi KURITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH QUADRANTS
- Publication number 20150114948
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Robin L. TINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATION OF MICROWAVE SOURCES THROUGH BELLOWS
- Publication number 20150002019
- Publication date Jan 1, 2015
- Applied Materials, Inc.
- Benjamin M. Johnston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinichi KURITA

Person

Patents Grantslast 30 patents

Film stress control for plasma enhanced chemical vapor deposition

Layer stack for display applications

Method of removal of sharp corners from diffuser plate

Film stress control for plasma enhanced chemical vapor deposition

Layer stack for display applications

Gas flow guide design for uniform flow distribution and efficient p...

Thin film encapsulation processing system and process kit

Thin film encapsulation mask preheat and substrate buffer chamber

Diffuser temperature control

Slit valve door with moving mating part

Grooved backing plate for standing wave compensation

Plasma uniformity control by gas diffuser hole design

Substrate support assembly with non-uniform gas flow clearance

Transfer robot with substrate cooling

Plasma uniformity control by gas diffuser hole design

Atomic layer deposition processing chamber permitting low-pressure...

Substrate support with quadrants

Vertical inline CVD system

Anodized showerhead

Substrate transfer robot with chamber and substrate monitoring capa...

Substrate support with quadrants

Susceptor assembly

Methods and apparatus for providing a floating seal for chamber doors

Method and apparatus for sealing an opening of a processing chamber

Ground return for plasma processes

Vertical inline CVD system

Isolation of microwave sources through bellows

Apparatus and method of forming an indium gallium zinc oxide layer

Plasma uniformity control by gas diffuser hole design

Substrate support with ceramic insulation

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM FOR MANUFACTURING TANDEM CELL STRUCTURES

FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

ASSEMBLED GRID TRAY

LAYER STACK FOR DISPLAY APPLICATIONS

FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

GAS FLOW GUIDE DESIGN FOR UNIFORM FLOW DISTRIBUTION AND EFFICIENT P...

METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE

LAYER STACK FOR DISPLAY APPLICATIONS

THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT

THIN FILM ENCAPSULATION MASK PREHEAT AND SUBSTRATE BUFFER CHAMBER

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

RF RETURN STRAP SHIELDING COVER

DODECADON TRANSFER CHAMBER AND PROCESSING SYSTEM HAVING THE SAME

NON-SHADOW FRAME PLASMA PROCESSING CHAMBER

SUBSTRATE SUPPORT ASSEMBLY WITH NON-UNIFORM GAS FLOW CLEARANCE

SUBSTRATE SUPPORT WITH QUADRANTS

GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES

DIFFUSER TEMPERATURE CONTROL

GROOVED BACKING PLATE FOR STANDING WAVE COMPENSATION

LARGE AREA DUAL SUBSTRATE PROCESSING SYSTEM

SHADOW FRAME WITH NON-UNIFORM GAS FLOW CLEARANCE FOR IMPROVED CLEANING

ATOMIC LAYER DEPOSITION PROCESSING CHAMBER PERMITTING LOW-PRESSURE...

THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT PERMITTIN...

GROUND RETURN FOR PLASMA PROCESSES

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

REMOTE PLASMA CLEAN SOURCE FEED BETWEEN BACKING PLATE AND DIFFUSER

APPARATUS AND METHOD OF FORMING AN INDIUM GALLIUM ZINC OXIDE LAYER

SUBSTRATE SUPPORT WITH QUADRANTS

ISOLATION OF MICROWAVE SOURCES THROUGH BELLOWS