Shinichi Machidori

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment system, substrate treatment method, and non-tra...
- Patent number 8,707,893
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TREATMENT METHOD, AND NON-TRA...
- Publication number 20120135148
- Publication date May 31, 2012
- TOKYO ELECTRON LIMITED
- Masatoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS