TREA

Shinichi Maeta

Follow

Person

  • Tokyo, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 11,012,008
    • Issue date May 18, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,923,381
    • Issue date Feb 16, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,622,239
    • Issue date Apr 14, 2020
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device, and semiconductor manufacturing device
    • Patent number 10,475,688
    • Issue date Nov 12, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori Ishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,256,131
    • Issue date Apr 9, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru Kosakai
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 10,153,192
    • Issue date Dec 11, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck apparatus
    • Patent number 9,837,296
    • Issue date Dec 5, 2017
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,466,518
    • Issue date Oct 11, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,412,635
    • Issue date Aug 9, 2016
    • Tokyo Electron Limited
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck device
    • Patent number 9,330,953
    • Issue date May 3, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electrostatic chucking device
    • Patent number 9,287,156
    • Issue date Mar 15, 2016
    • Sumitomo Osaka Cement Co., Ltd.
    • Yoshiaki Moriya
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20210006182
    • Publication date Jan 7, 2021
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi MAETA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20190019714
    • Publication date Jan 17, 2019
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180269097
    • Publication date Sep 20, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi MAETA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180254211
    • Publication date Sep 6, 2018
    • Mamoru KOSAKAI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20180108555
    • Publication date Apr 19, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Mamoru KOSAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
    • Publication number 20180025933
    • Publication date Jan 25, 2018
    • Sumitomo Osaka Cement Co., Ltd.
    • Kazunori ISHIMURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140376148
    • Publication date Dec 25, 2014
    • Yasuharu Sasaki
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140355169
    • Publication date Dec 4, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCKING DEVICE
    • Publication number 20140204501
    • Publication date Jul 24, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Yoshiaki Moriya
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK DEVICE
    • Publication number 20140008880
    • Publication date Jan 9, 2014
    • Sumitomo Osaka Cement Co., Ltd.
    • Yukio Miura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK APPARATUS
    • Publication number 20130265690
    • Publication date Oct 10, 2013
    • Sumitomo Osaka Cement Co., Ltd.
    • Shinichi Maeta
    • H01 - BASIC ELECTRIC ELEMENTS