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Shinichi Matsubara

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  • Tokyo, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ION BEAM DEVICE AND EMITTER TIP MILLING METHOD
    • Publication number 20240203682
    • Publication date Jun 20, 2024
    • HITACHI HIGH-TECH CORPORATION
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20220301812
    • Publication date Sep 22, 2022
    • Shinichi Matsubara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS FIELD IONIZATION SOURCE
    • Publication number 20200365360
    • Publication date Nov 19, 2020
    • Hitachi, Ltd
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING EMITTER, EMITTER, AND FOCUSED ION BEAM APPA...
    • Publication number 20200312603
    • Publication date Oct 1, 2020
    • HITACHI HIGH-TECH SCIENCE CORPORATION
    • Tomokazu KOZAKAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE AND CLEANING METHOD FOR GAS FIELD ION SOURCE
    • Publication number 20200294776
    • Publication date Sep 17, 2020
    • Hitachi High-Technologies Corporation
    • Yoshimi KAWANAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Device
    • Publication number 20190295802
    • Publication date Sep 26, 2019
    • Hitachi High-Technologies Corporation
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FIELD IONIZATION SOURCE, ION BEAM APPARATUS, AND BEAM IRRADIATION M...
    • Publication number 20190051491
    • Publication date Feb 14, 2019
    • Hitachi High-Technologies Corporation
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Apparatus
    • Publication number 20180308658
    • Publication date Oct 25, 2018
    • HITACHI HIGH-TECH SCIENCE CORPORATION
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Mirror Ion Microscope and Ion Beam Control Method
    • Publication number 20180025888
    • Publication date Jan 25, 2018
    • Hitachi, Ltd
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM SYSTEM
    • Publication number 20180012726
    • Publication date Jan 11, 2018
    • HITACHI HIGH-TECH SCIENCE CORPORATION
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Device
    • Publication number 20170352517
    • Publication date Dec 7, 2017
    • Hitachi High-Technologies Corporation
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE AND SAMPLE OBSERVATION METHOD
    • Publication number 20170229284
    • Publication date Aug 10, 2017
    • Hitachi, Ltd
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM APPARATUS AND ION BEAM IRRADIATION METHOD
    • Publication number 20170229277
    • Publication date Aug 10, 2017
    • Hitachi High-Technologies Corporation
    • Shinichi MATSUBARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20170076902
    • Publication date Mar 16, 2017
    • Hitachi High-Technologies Corporation
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ion Beam Device and Emitter Tip Adjustment Method
    • Publication number 20160225575
    • Publication date Aug 4, 2016
    • Hiroyuki MUTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHARGED PARTICLE MICROSCOPE
    • Publication number 20150083930
    • Publication date Mar 26, 2015
    • Hitachi High-Technologies Corporation
    • Shinichi Matsubara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20140319370
    • Publication date Oct 30, 2014
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE AND ION BEAM DEVICE USING SAME
    • Publication number 20140299768
    • Publication date Oct 9, 2014
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Charged Particle Microscope and Ion Microscope
    • Publication number 20130126731
    • Publication date May 23, 2013
    • Hitachi High-Technologies Corporation
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS FIELD ION SOURCE AND METHOD FOR USING SAME, ION BEAM DEVICE, AN...
    • Publication number 20130119252
    • Publication date May 16, 2013
    • Yoshimi Kawanami
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCO...
    • Publication number 20130087704
    • Publication date Apr 11, 2013
    • Hitachi High-Technologies Corporation
    • Tohru Ishitani
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20120319003
    • Publication date Dec 20, 2012
    • Hitachi High-Technologies Corporation
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHARGED PARTICLE MICROSCOPE
    • Publication number 20120217391
    • Publication date Aug 30, 2012
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS FIELD ION SOURCE, CHARGED PARTICLE MICROSCOPE, AND APPARATUS
    • Publication number 20120119086
    • Publication date May 17, 2012
    • Hitachi High-Technologies Corporation
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20110266465
    • Publication date Nov 3, 2011
    • Hitachi High-Technologies Corporation
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION BEAM DEVICE
    • Publication number 20110147609
    • Publication date Jun 23, 2011
    • Hitachi High-Technologies Corporation
    • Hiroyasu Shichi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Gas field ion source, charged particle microscope, and apparatus
    • Publication number 20090173888
    • Publication date Jul 9, 2009
    • Hitachi High-Technologies Corporation
    • Hiroyasu SHICHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Gas field ionization ion source, scanning charged particle microsco...
    • Publication number 20090152462
    • Publication date Jun 18, 2009
    • Hitachi High-Technologies Corporation
    • Tohru Ishitani
    • B82 - NANO-TECHNOLOGY