Shinichi Miyano

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and lid supporting apparatus for the...
- Patent number 7,883,579
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Akira Kodashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20100263196
- Publication date Oct 21, 2010
- TOKYO ELECTRON LIMITED
- Shinichi MIYANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON MEMBER AND METHOD OF MANUFACTURING THE SAME
- Publication number 20080277768
- Publication date Nov 13, 2008
- COVALENT MATERIALS CORPORATION
- Masataka MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode plate for use in plasma processing and plasma processing...
- Publication number 20070256638
- Publication date Nov 8, 2007
- Masanobu Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and lid supporting apparatus for the...
- Publication number 20070131167
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Akira Kodashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon member and method of manufacturing the same
- Publication number 20060170078
- Publication date Aug 3, 2006
- TOSHIBA CERAMICS CO., LTD.
- Masataka Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate processing method, and st...
- Publication number 20060169209
- Publication date Aug 3, 2006
- TOKYO ELECTON LIMITED
- Shinichi Miyano
- H01 - BASIC ELECTRIC ELEMENTS