Shinichi OKI

Person

Chiba-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Bipolar electrostatic chuck for etch chamber
- Patent number 12,165,899
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shinichi Oki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber components for epitaxial growth apparatus
- Patent number 11,441,236
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat shield assembly for an epitaxy chamber
- Patent number 11,032,945
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper cone for epitaxy chamber
- Patent number 10,978,324
- Issue date Apr 13, 2021
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support assembly for substrate backside discoloration control
- Patent number 10,704,146
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components for epitaxial growth apparatus
- Patent number 10,544,518
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper cone for epitaxy chamber
- Patent number 10,446,420
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Shinichi Oki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat shield ring for high growth rate EPI chamber
- Patent number 9,879,358
- Issue date Jan 30, 2018
- Applied Materials, Inc.
- Shinichi Oki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY
- Publication number 20250051910
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Shinichi OKI
- B08 - CLEANING
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER
- Publication number 20240120229
- Publication date Apr 11, 2024
- Shinichi OKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT SHIELD ASSEMBLY FOR AN EPITAXY CHAMBER
- Publication number 20210015004
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Shinichi OKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
UPPER CONE FOR EPITAXY CHAMBER
- Publication number 20200020556
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Shinichi OKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECT ASSEMBLY FOR EPITAXIAL DEPOSITION PROCESSES
- Publication number 20190062909
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Shinichi OKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UPPER CONE FOR EPITAXY CHAMBER
- Publication number 20180053670
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Shinichi OKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT SHIELD RING FOR HIGH GROWTH RATE EPI CHAMBER
- Publication number 20160348275
- Publication date Dec 1, 2016
- Applied Materials, Inc.
- Shinichi OKI
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS
- Publication number 20160281262
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Shinichi OKI
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS
- Publication number 20160281263
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Shinichi OKI
- C30 - CRYSTAL GROWTH
Information Patent Application
CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS
- Publication number 20160281261
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- Shinichi OKI
- C30 - CRYSTAL GROWTH
Information Patent Application
SUPPORT ASSEMBLY FOR SUBSTRATE BACKSIDE DISCOLORATION CONTROL
- Publication number 20160204005
- Publication date Jul 14, 2016
- Applied Materials, Inc.
- Shinichi OKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shinichi OKI

Person

Patents Grantslast 30 patents

Bipolar electrostatic chuck for etch chamber

Chamber components for epitaxial growth apparatus

Heat shield assembly for an epitaxy chamber

Upper cone for epitaxy chamber

Support assembly for substrate backside discoloration control

Chamber components for epitaxial growth apparatus

Upper cone for epitaxy chamber

Heat shield ring for high growth rate EPI chamber

Patents Applicationslast 30 patents

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER

HEAT SHIELD ASSEMBLY FOR AN EPITAXY CHAMBER

UPPER CONE FOR EPITAXY CHAMBER

INJECT ASSEMBLY FOR EPITAXIAL DEPOSITION PROCESSES

UPPER CONE FOR EPITAXY CHAMBER

HEAT SHIELD RING FOR HIGH GROWTH RATE EPI CHAMBER

CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS

CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS

CHAMBER COMPONENTS FOR EPITAXIAL GROWTH APPARATUS

SUPPORT ASSEMBLY FOR SUBSTRATE BACKSIDE DISCOLORATION CONTROL