Shinichi Okita

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, method of confirmation of its state of...
- Patent number 8,996,422
- Issue date Mar 31, 2015
- Nikon Corporation
- Hiroyuki Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment information display method and its program, alignment met...
- Patent number 8,982,320
- Issue date Mar 17, 2015
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing condition determining method and apparatus, display meth...
- Patent number 8,566,756
- Issue date Oct 22, 2013
- Nikon Corporation
- Shinichi Okita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus, exposure method and device manufacturing method
- Patent number 8,355,113
- Issue date Jan 15, 2013
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing method, device manufacturing system, and measu...
- Patent number 8,159,650
- Issue date Apr 17, 2012
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustment method, substrate processing method, substrate processin...
- Patent number 8,134,681
- Issue date Mar 13, 2012
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for connecting device manufacturing processing ap...
- Patent number 8,090,875
- Issue date Jan 3, 2012
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control method, control system, and program
- Patent number 7,941,232
- Issue date May 10, 2011
- Nikon Corporation
- Yuuki Ishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing system, program,...
- Patent number 7,855,784
- Issue date Dec 21, 2010
- Nikon Corporation
- Shinichi Okita
- G01 - MEASURING TESTING
Information Patent Grant
Evaluation system and method of a search operation that detects a d...
- Patent number 7,838,858
- Issue date Nov 23, 2010
- Nikon Corporation
- Shinichi Okita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment condition determination method and apparatus of the same,...
- Patent number 7,746,446
- Issue date Jun 29, 2010
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay management method and apparatus, processing apparatus, meas...
- Patent number 7,718,327
- Issue date May 18, 2010
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring and/or inspecting method, measuring and/or inspecting app...
- Patent number 7,688,436
- Issue date Mar 30, 2010
- Nikon Corporation
- Shinichi Okita
- G01 - MEASURING TESTING
Information Patent Grant
Measuring method, measuring system, inspecting method, inspecting s...
- Patent number 7,593,100
- Issue date Sep 22, 2009
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus
- Patent number 6,992,751
- Issue date Jan 31, 2006
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus
- Patent number 6,538,721
- Issue date Mar 25, 2003
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image processing method and apparatus
- Patent number 5,479,537
- Issue date Dec 26, 1995
- Nikon Corporation
- Muneki Hamashima
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
ADJUSTMENT METHOD, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSIN...
- Publication number 20120133913
- Publication date May 31, 2012
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method and device manufacturing method
- Publication number 20090153819
- Publication date Jun 18, 2009
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD
- Publication number 20090073407
- Publication date Mar 19, 2009
- NIKON CORPORATION
- Shinichi Okita
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, PROGRAM,...
- Publication number 20090059217
- Publication date Mar 5, 2009
- Nikon Corporation
- Shinichi OKITA
- G01 - MEASURING TESTING
Information Patent Application
DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURING SYSTEM, AND MEASU...
- Publication number 20090009741
- Publication date Jan 8, 2009
- Nikon Corporation
- Shinichi OKITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING CONDITION DETERMINING METHOD AND APPARATUS, DISPLAY METH...
- Publication number 20080294280
- Publication date Nov 27, 2008
- Nikon Corporation
- Shinichi OKITA
- G05 - CONTROLLING REGULATING
Information Patent Application
OVERLAY MANAGEMENT METHOD AND APPARATUS, PROCESSING APPARATUS, MEAS...
- Publication number 20080286667
- Publication date Nov 20, 2008
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Control method, control system, and program
- Publication number 20080221709
- Publication date Sep 11, 2008
- Nikon Corporation
- Yuuki Ishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Information Display Method And Its Program, Alignment Met...
- Publication number 20080106714
- Publication date May 8, 2008
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Condition Determination Method and Apparatus of the Same,...
- Publication number 20080094642
- Publication date Apr 24, 2008
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning method, processing system, measurement method of substr...
- Publication number 20080013089
- Publication date Jan 17, 2008
- Nikon Corporation
- Yuuki Ishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Processing System, Method of Confirmation of Its State of...
- Publication number 20070272151
- Publication date Nov 29, 2007
- Nikon Corporation
- Hiroyuki Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measuring and/or inspecting method, measuring and/or inspecting app...
- Publication number 20070259290
- Publication date Nov 8, 2007
- Nikon Corporation
- Shinichi Okita
- G01 - MEASURING TESTING
Information Patent Application
Adjustment method, substrate processing method, substrate processin...
- Publication number 20070219736
- Publication date Sep 20, 2007
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for connecting device manufacturing processing ap...
- Publication number 20070142950
- Publication date Jun 21, 2007
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Analytical apparatus, processing apparatus, measuring and/or inspec...
- Publication number 20070105244
- Publication date May 10, 2007
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pre-measurement processing method, exposure system and substrate pr...
- Publication number 20070052939
- Publication date Mar 8, 2007
- Nikon Corporation
- Yuuki Ishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Evaluation system and evaluation method
- Publication number 20060285740
- Publication date Dec 21, 2006
- Nikon Corporation
- Shinichi Okita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measuring method, measuring system, inspecting method, inspecting s...
- Publication number 20060203232
- Publication date Sep 14, 2006
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Detection method for optimum position detection formula, alignment...
- Publication number 20060040191
- Publication date Feb 23, 2006
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus
- Publication number 20030133088
- Publication date Jul 17, 2003
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus
- Publication number 20020149755
- Publication date Oct 17, 2002
- Nikon Corporation
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
scanning exposure apparatus
- Publication number 20020021433
- Publication date Feb 21, 2002
- Shinichi Okita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shinichi Okita

Person

Patents Grantslast 30 patents

Substrate processing system, method of confirmation of its state of...

Alignment information display method and its program, alignment met...

Processing condition determining method and apparatus, display meth...

Exposure apparatus, exposure method and device manufacturing method

Device manufacturing method, device manufacturing system, and measu...

Adjustment method, substrate processing method, substrate processin...

Device and method for connecting device manufacturing processing ap...

Control method, control system, and program

Substrate processing method, substrate processing system, program,...

Evaluation system and method of a search operation that detects a d...

Alignment condition determination method and apparatus of the same,...

Overlay management method and apparatus, processing apparatus, meas...

Measuring and/or inspecting method, measuring and/or inspecting app...

Measuring method, measuring system, inspecting method, inspecting s...

Scanning exposure apparatus

Scanning exposure apparatus

Image processing method and apparatus

Patents Applicationslast 30 patents

ADJUSTMENT METHOD, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSIN...

Exposure apparatus, exposure method and device manufacturing method

EXPOSURE APPARATUS AND EXPOSURE METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, PROGRAM,...

DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURING SYSTEM, AND MEASU...

PROCESSING CONDITION DETERMINING METHOD AND APPARATUS, DISPLAY METH...

OVERLAY MANAGEMENT METHOD AND APPARATUS, PROCESSING APPARATUS, MEAS...

Control method, control system, and program

Alignment Information Display Method And Its Program, Alignment Met...

Alignment Condition Determination Method and Apparatus of the Same,...

Positioning method, processing system, measurement method of substr...

Substrate Processing System, Method of Confirmation of Its State of...

Measuring and/or inspecting method, measuring and/or inspecting app...

Adjustment method, substrate processing method, substrate processin...

Device and method for connecting device manufacturing processing ap...

Analytical apparatus, processing apparatus, measuring and/or inspec...

Pre-measurement processing method, exposure system and substrate pr...

Evaluation system and evaluation method

Measuring method, measuring system, inspecting method, inspecting s...

Detection method for optimum position detection formula, alignment...

Scanning exposure apparatus

Scanning exposure apparatus

scanning exposure apparatus