Shinichi SEKI

Follow

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Solution treatment apparatus and cleaning method
- Patent number 11,868,057
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kenta Shibasaki
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,273,464
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 8,774,491
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Shinichi Seki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20240085813
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20220113643
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210039131
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20120257813
- Publication date Oct 11, 2012
- Shinichi SEKI
- G06 - COMPUTING CALCULATING COUNTING